Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof

• US 6,363,183 B1
• Filed: 01/04/2000
• Issued: 03/26/2002
• Est. Priority Date: 01/04/2000
• Status: Expired due to Fees

• Current Assignee: Seungug Koh
• Original Assignee: Seungug Koh
• Inventors: Koh, Seungug
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): Rahll, Jerry T
• Application Number:
  US09/477,618
• Time in Patent Office: 812 Days
• Field of Search: 385/14, 385/15-20
• US Class Current: 385/19
• CPC Class Codes: G02B 2006/12176 Etching
• CPC Class Codes: G02B 6/132 by deposition of thin films
• CPC Class Codes: G02B 6/3514 the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3596 With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Abstract

Over the last several years, the rapidly increasing traffic volume carried by telecommunication networks has been clearly observed as a result of the bandwidth-intensive applications such as Internet access, electronic commerce, multimedia applications, and distributed computing. Optical telecommunication systems employing optical fibers as the transmission medium have exhibited a superior performance/cost ratio for both long-haul and short-haul routes and the emerging dense wavelength division multiplexing (DWDM)/all-optical networks have shown some promising potentials. However there still exists a need to improve speed, capacity and connectivity of optical telecommunication networks, as the information system'"'"'s subscriber growth increases unrestrained. The present invention provides a reconfigurable and scalable fiber optic switching for optical telecommunication networks by integrating MEMS actuators and PLCs for optical signal switching and routing. The integrated optic waveguide switches and optical cross-connect networks are particularly applicable for DWDM/all-optical networks due to its low cost, small crosstalk, reliable, compact, reconfigurable, modular, scalable, and wavelength/polarization insensitive characteristics. The integrated optic waveguide switch can be configured into a variety of all-optical network component such as Add/Drop switch, optical cross-connect switch array, and Add/Drop DWDM filter by combining MEMS actuators and PLC networks into an integrated hybrid microsystem: Micro-Opto-Electro-Mechanical System (MOEMS).

Claims

1. A multifunctional integrated optic waveguide add/drop multiplexing element comprising:

light-transmitting waveguides with a cross connecting configuration on a planar lightwave circuit and optical fibers coupled into said light-transmitting waveguides;

a four-sided trench with four substantially vertical sidewalls at a cross connecting location of said light-transmitting waveguides, wherein cores of said light-transmitting waveguides being individually terminated by said four substantially vertical sidewalls of said four-sided trench, and further wherein, said four-sided trench being defined and fabricated by lithographic micromachining processes;

a substantially long and narrow two-sided trench with two parallel and substantially vertical sidewalls, wherein said two-sided trench diagonally intersecting with said four-sided trench and extruding further beyond area defined by said four-sided trench without crossing any cores of said light-transmitting waveguides;

a substantially vertical movable plate placed into said four-sided trench and positioned along said two-sided trench in order to alter propagation and distribution of optical signals among four ports defined by said four-sided trench reflectively, refractively, diffractively, transmitively, or any combination thereof, wherein said optical signals comprising a single or a plurality of optical wavelength channels, and further wherein, said vertical movable plate capable of selectively adding, dropping, or any combination thereof entire or any particular spectral bands of said optical wavelength channels without influencing other pass-through signals of said optical wavelength channels;

tapered and shifted cores of light-transmitting waveguides at said four-sided trench in order to increase optical signal coupling efficiency, to improve optical signal uniformity, and to reduce alignment requirements for said vertical movable plate relative to sender and receiver ports at said four-sided trench, wherein said tapered cores being either symmetric or asymmetric; and

a bulk-micromachined moving device on a substrate with means of attaching said vertical movable plate to itself and said bulk-micromachined moving device capable of displacing said vertical movable plate in and out of optical paths, partially or completely, within areas defined by said four-sided trench.

2. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, wherein said light-transmitting waveguides supporting a single or a plurality of electromagnetic wave propagation mode and said light-transmitting waveguides comprising a core and adjacent cladding composed of doped silica glass, polymer, SiON, or silicon materials, and further wherein, device structures for said light-transmitting waveguides comprising buried type, ridge-type, step-index, or graded-index waveguides.

3. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, wherein said light-transmitting waveguides comprising tilted waveguide sidewalls at said four-sided trench in order to reduce back-reflection of said optical signals, and further wherein, said tilted waveguide sidewalls being defined and fabricated by lithographic micromachining processes.

4. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, wherein said bulk-micromachined moving device comprises MEMS actuator utilizing electrostatic comb driver, crab leg suspension spring, and electrically conductive pathways to distribute control signals.

5. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, wherein said bulk-micromachined moving device providing horizontal or vertical motion of said vertical movable plate in order to alter propagation and distribution of optical signals at said four-sided trench.

6. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, further comprising a plurality of electrically conductive pathway, photonic chip, and electronic chip on said planar lightwave circuit.

7. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, wherein said vertical movable plate further comprises separately fabricated and substantially flat optical component including wavelength-sensitive multilayer thin-film filter plate, reflective thin-film plate, diffractive thin-film plate, transmitive thin-film plate, polarization-sensitive thin-film plate, or any combination thereof, and further wherein, said vertical movable plate being subsequently assembled within structural layer of said moving device or extruded out of structural layer of said moving device.

8. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, wherein said vertical movable plate comprises non-parallel, wedge-shape, and substantially-flat or substantially-contoured smooth planes of front and back surfaces in order to alter propagation and distribution of said optical signals.

9. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, further comprising a plurality of said bulk-micromachined moving device with said vertical movable plate.

10. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, both said four-sided trench and said two-sided trench being filled with air or index-matching fluid.

11. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, further constructing a plurality of said multifunctional integrated optic waveguide add/drop multiplexing element in an array configuration on said planar lightwave circuit.

12. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, further constructing a plurality of said multifunctional integrated optic waveguide add/drop multiplexing element and being interconnected serially, parallel, or any combination thereof on said planar lightwave circuit.

13. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, said bulk-micromachined moving device capable of partially or completely displacing said vertical movable plate, with a small step, in and out of said optical paths in order to provide a variable optical attenuation.

14. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claim 1, further comprising a substantially large trench connected to one end of said two-sided trench in order to accommodate said bulk-micromachined moving device into a layer, within which said light-transmitting waveguide resides, and said vertical movable plate further comprising substantially-flat or substantially-contoured smooth planes of front and back surfaces coated with a layer of reflective material, and further wherein, said vertical movable plate being fabricated using a structural layer of said bulk-micromachined moving device.

15. The multifunctional integrated optic waveguide add/drop multiplexing element as cited in claims further capable of reducing into one-input/two-output or two-input/one-output configurations by using only one side of said vertical movable plate and capable of displacing said one side of said vertical movable plate into cross connecting location of said light-transmitting waveguides.

16. A zero-static power consumption micro electromechanical actuator comprising:

an electrostatic comb driver with vertical movable plate having lock microstructures, wherein said lock microstructures being integrated into structural layer of said electrostatic comb driver;

a plurality of electrostatic comb drivers having key microstructures, wherein said key microstructures being integrated into structural layer of said electrostatic comb drivers, and further wherein, said key microstructures and said lock microstructures capable of engaging or disengaging with each other; and

said electrostatic comb driver with vertical movable plate positions itself in a steady-state lock state with zero or minimum power consumption if said key microstructures are engaged with said lock microstructures, and said electrostatic comb driver with vertical movable plate positions itself in a freely movable release position if said key microstructures are disengaged from said lock microstructures.

17. The zero-static power consumption micro electromechanical actuator as cited in claim 16, further comprising a plurality of support microstructures to guide motions of electrostatic comb drivers and to allow microstructures of said electrostatic comb drivers firmly engaged with each other without introducing substantial bending or distortion during said steady-state lock state or said freely movable release state.