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Gas-driven microturbine

  • US 6,363,712 B1
  • Filed: 07/14/1999
  • Issued: 04/02/2002
  • Est. Priority Date: 06/27/1996
  • Status: Expired due to Term
First Claim
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1. A gas-driven microturbine developed using a polysilicon surface-micromachining batch-fabricated technique comprising:

  • a substrate base;

    a holding tank formed on said substrate base;

    a fuel delivery system formed on said substrate base further comprising at least one inlet tube for transporting a fuel set from said holding tank to a reaction chamber;

    a reaction chamber formed on said substrate base, further comprising a means for heating said fuel set;

    a flow channel formed on said substrate base extending from said reaction chamber and protruding into a turbine housing;

    a turbine housing formed on said substrate base in which said flow channel receives a high-flow gas stream generated in said reaction chamber by heating of said fuel set to drive a turbine;

    a turbine contained within said turbine housing and made rotatably secured by a central turbine hub formed on and attached to said substrate base;

    a mechanical linkage arm formed on said substrate base and attached to said turbine by a pin joint, wherein rotational motion from said turbine induces linear motion on said mechanical linkage arm;

    a mechanical load formed on said substrate and located in close proximity to said turbine housing wherein said mechanical load is attached to said mechanical linkage arm;

    an exhaust port means formed on said substrate base extending from said turbine housing.

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