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Substrate transport container

  • US 6,364,922 B1
  • Filed: 07/06/2000
  • Issued: 04/02/2002
  • Est. Priority Date: 07/06/1999
  • Status: Expired due to Fees
First Claim
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1. A combination of a substrate transport container and an automatic door opener configured to open and close automatically a wafer loading/unloading door of a substrate transport container;

  • wherein said automatic door opener has charging terminals for automatically charging a secondary battery of said substrate transport container when said substrate transport container is placed on said automatic door opener;

    wherein said substrate transport container comprises;

    a carrier box including a container body and said wafer loading/unloading door sealably covering an opening provided in a front or a bottom of said container body;

    partitions configured to form a circulating flow path in said carrier box, said circulating flow path having a flow path in which air flows toward substrates and a flow path in which air flows toward a fan;

    a substrate carrying section disposed in said flow path in which air flows toward the substrates to carry the substrates in such a way that principal surfaces of the substrates are approximately parallel to said flow path in which air flows toward the substrates;

    a combination of a particle removing filter and a gaseous impurity trapping filter placed on an upstream side of said substrate carrying section in said flow path in which air flows toward the substrates; and

    a fan motor incorporated in said carrier box and configured to drive said fan to form an air current for circulating through said circulating flow path.

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