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300 mm CVD chamber design for metal-organic thin film deposition

  • US 6,364,949 B1
  • Filed: 10/19/1999
  • Issued: 04/02/2002
  • Est. Priority Date: 10/19/1999
  • Status: Expired due to Term
First Claim
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1. A faceplate for a chemical vapor deposition chamber showerhead assembly, comprising:

  • (a) a central monolithic portion comprising an upper face and a lower face and including a plurality of gas outlet holes extending between the upper face and the lower face; and

    (b) an annular raised shoulder concentrically disposed about a perimeter of the central monolithic portion and having a substantially planar temperature control plate mounting surface disposed generally parallel to the lower face.

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