Method and apparatus for arc plasma deposition with evaporation of reagents

• US 6,365,016 B1
• Filed: 03/17/1999
• Issued: 04/02/2002
• Est. Priority Date: 03/17/1999
• Status: Expired due to Term

• Current Assignee: Sabic Innovative Plastics IP BV (Government of Saudi Arabia)
• Original Assignee: General Electric Company
• Inventors: Marzano, Patrick Peter, Borst, Keith Milton, Iacovangelo, Charles Dominic, Yang, Barry Lee-Mean, Jerabek, Elihu Calvin
• Primary Examiner(s): PADGETT, MARIANNE L
• Application Number:
  US09/271,655
• Time in Patent Office: 1,112 Days
• Field of Search: 427/453, 427/455, 427/529, 427/530, 427/531, 427/564, 427/566, 427/567, 427/576, 427/580, 204/192.38
• US Class Current: 204/192.38
• CPC Class Codes: C23C 14/228 Gas flow assisted PVD deposition
• CPC Class Codes: C23C 14/32 by explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-platingC23C14/34 - C23C14/48 take precedence
• CPC Class Codes: C23C 16/513 using plasma jets
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma

Abstract

A method and apparatus for depositing a coating on a substrate. A method of coating a substrate comprises evaporating a first reactant; introducing the evaporated reactant into a plasma; and depositing the first reactant on a surface of the substrate. This method may be used to deposit an electrically conductive, ultraviolet filter coating at high rate on a glass or polycarbonate substrate, for example. An apparatus for depositing a UV filter coating on a polymeric substrate comprises a plasma generator having an anode and a cathode to form a plasma, and a first inlet for introducing a first reactant into the plasma, the first reactant comprising an evaporated material that is deposited on the substrate by the plasma. Optionally, a nozzle can be utilized to provide a controlled delivery of the first reactant into the plasma.

Claims

1. A method of coating a substrate, the method comprising the steps of:

generating a plasma by ionizing a carrier gas with an arc extending between an anode and a cathode, wherein the cathode is substantially non-consumable, and wherein the plasma is directed toward the substrate as a result of a pressure difference between a first chamber in which the plasma is generated and a second chamber in which the substrate is located;

evaporating a metallic reactant from a source which is separate from the cathode and anode; and

introducing the evaporated metallic reactant into the flowing plasma such that the plasma projects the metallic reactant onto the substrate.

2. The method of claim 1, wherein the metallic reactant comprises an elemental metal.

3. The method of claim 1, Wherein the metallic reactant comprises an alloy.

4. The method of claim 1, further comprising the step of introducing an oxidant into the flowing plasma to react with the evaporated metallic reactant.

5. The method of claim 1, wherein the metallic reactant is selected from the group consisting of elemental zinc, elemental indium, elemental aluminum, an indium zinc alloy, and an aluminum zinc alloy.

6. The method of claim 1, further comprising the step of controlling a rate of deposition of the metallic reactant.

7. The method of claim 6, wherein the rate of deposition is controlled by controlling a vapor pressure of the metallic reactant.

8. The method of claim 6, wherein the rate of deposition is controlled by controlling a current supplied to the arc.

9. The method of claim 1, further comprising the step of introducing a second reactant from a second source into the flowing plasma along with the metallic reactant.

10. The method of claim 9, further comprising:

reacting the metallic reactant and the second reactant in the flowing plasma to form a compound comprising the metallic reactant and the second reactant; and

depositing the compound on the substrate.

11. The method of claim 10, wherein the first reactant comprises zinc, the second reactant comprises oxygen, and the compound formed is zinc oxide.

12. The method of claim 9, further comprising the step of introducing a third reactant from a third source into the flowing plasma along with the metallic reactant and the second reactant.

13. The method of claim 12, further comprising:

reacting the metallic reactant, the second reactant, and the third reactant in the plasma to form a compound comprising the metallic reactant, the second reactant, and the third reactant; and

depositing the compound on the substrate.

14. The method of claim 13, wherein the first reactant comprises zinc, the second reactant comprises oxygen, and the third reactant comprises a dopant, and the compound comprises doped zinc oxide, and wherein the compound is deposited on the substrate.

15. The method of claim 13, wherein the first reactant comprises zinc, the second reactant comprises oxygen, and the third reactant comprises indium, and the compound comprises indium zinc oxide, and wherein the compound is deposited on the substrate.

16. The method of claim 13, wherein the first reactant comprises zinc, the second reactant comprises oxygen, and the third reactant comprises aluminum, and the compound comprises aluminum zinc oxide, and wherein the compound is deposited on the substrate.

17. The method of claim 1, wherein the step of introducing the evaporated metallic reactant into the flowing plasma comprises directing the evaporated metallic reactant into a nozzle which extends from the anode.

18. The method of claim 17, wherein the step of directing the evaporated metallic reactant into the nozzle comprises providing a conduit in fluid communication with at least one opening into the nozzle.

19. The method of claim 18, further comprising the step of introducing a second reactant into the flowing plasma through a second conduit in fluid communication with a second opening into the nozzle.

20. The method of claim 18, further comprising:

coupling an evaporator to the conduit.

21. The method of claim 1, further comprising:

placing the substrate in a second chamber;

introducing a plasma into a first chamber in fluid communication with the second chamber;

generating the arc in the first chamber between the anode and the cathode to generate the plasma; and

reducing a second pressure in the second chamber below a first pressure in the first chamber to cause the plasma to flow into the second chamber toward the substrate.

22. The method of claim 21, further comprising the steps of:

providing an aperture in the anode; and

providing a nozzle which extends from the anode.

23. The method of claim 22, further comprising the step of controlling, with the nozzle, a density of the plasma as a function of distance to the substrate.

24. The method of claim 21, wherein the metallic reactant comprises zinc, and the method further comprises the steps of:

evaporating a second metallic reactant into the plasma;

flowing an oxidant into the plasma;

reacting the zinc, the second metallic reactant, and the oxidant in the plasma to form a compound; and

depositing the compound on the substrate.

25. The method of claim 24, wherein the second metallic reactant comprises indium.

26. The method of claim 1, wherein the step of evaporating the metallic reactant comprises:

continuously supplying a metallic reactant wire into an evaporator; and

vaporating a portion of the wire in the evaporator.

27. The method of claim 1, wherein the step of introducing the evaporated metallic reactant into the flowing plasma comprises directing the metallic reactant into a nozzle which diverges in a flow direction toward the substrate.

28. The method of claim 1, wherein the step of introducing the evaporated metallic reactant into the flowing plasma comprises directing the metallic reactant into a nozzle having a conical inner surface which diverges in a flow direction toward the substrate.

29. The method of claim 1, wherein the step of introducing the evaporated metallic reactant into the flowing plasma comprises directing the evaporated metallic reactant through a conduit having a circular path and a plurality of holes which open into an inner surface of a diverging nozzle.

30. The method of claim 1, further comprising the step of controlling a power applied to:

a) the anode and the cathode and b) the source of the metallic reactant, wherein the power applied to the anode and cathode and the power applied to the source of the metallic reactant are controlled independently of each other.

31. The method of claim 1, wherein the anode includes an aperture through which the plasma flows, and the pressure difference between the first chamber and the second chamber and a size of the aperture together produce a plasma jet which flows into the second chamber.

32. A method of coating a first surface and a second surface of a substrate, comprising:

generating a first plasma by ionizing a first carrier gas with a fist arc extending between a first anode and a first cathode, wherein the first cathode is substantially non-consumable, and wherein the first plasma is directed toward the first surface of the substrate as a result of a pressure difference between a first chamber in which the first plasma is generated and a second chamber in which the substrate is located;

generating a second plasma by ionizing a second carrier gas with a second arc extending between a second anode and a second cathode, wherein the second cathode is substantially non-consumable, and wherein the second plasma is directed toward the second surface of the substrate;

evaporating a metallic reactant from a source which is separate from the first cathode and first anode;

introducing the evaporated tic reactant into the first plasma such that the fist plasma projects the metallic reactant onto the first surface of the substrate; and

introducing a second reactant into the second plasma to project the second reactant onto the second surface of the substrate.

33. The method of claim 32, wherein the first plasma is generated by the first arc extending between the first anode and the first cathode, and the step of introducing the evaporated metallic reactant into the first plasma comprises directing the evaporated metallic reactant through a divergent nozzle toward the substrate.

34. The method of claim 32, wherein the step of introducing the evaporated metallic reactant into the first plasma comprises directing the evaporated metallic reactant through a conduit having a circular path and a plurality of holes which open to an inner surface of a diverging nozzle.

35. The method of claim 33, wherein the metallic reactant comprises zinc, and the method further comprises the step of introducing an oxidant into the plasma with the zinc.

36. The method of claim 35, further comprising the step of introducing at least one of indium and aluminum into the first plasma with the zinc and the oxidant.

37. A method of coating a substrate, the method comprising the steps of:

generating a plasma by ionizing a carrier gas with an arc extending between an anode and a cathode, wherein the cathode is substantially non-consumable, and wherein the plasma flows toward the substrate;

evaporating a metallic reactant; and

introducing the evaporated metallic reactant into the flowing plasma by directing the evaporated metallic reactant into a nozzle which diverges in a flow direction toward the substrate to project the metallic reactant onto the substrate.

38. The method of claim 37, wherein the nozzle has a conical inner surface.

39. The method of claim 37, wherein the step of introducing the evaporated metallic reactant into the flowing plasma comprises directing the evaporated metallic reactant through a circular conduit having a plurality of holes which open into an inner surface of the nozzle.

40. The method of claim 37, further comprising the step of controlling a power applied to:

a) the anode and the cathode and b) the source of the metallic reactant, wherein the power applied to the anode and cathode and the power applied to the source of the metallic reactant are controlled independently of each other.

41. The method of claim 37, wherein the metallic reactant comprises zinc, and the method further comprises the steps of:

introducing an oxidant into the plasma with the zinc; and

introducing at least one of indium and aluminum into the plasma with the zinc and the oxidant.