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Surface treatment material deposition and recapture

  • US 6,365,229 B1
  • Filed: 09/27/1999
  • Issued: 04/02/2002
  • Est. Priority Date: 09/30/1998
  • Status: Active Grant
First Claim
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1. A method of applying a surface treatment, said method comprising the steps of:

  • providing a surface treatment material in a source chamber;

    evacuating a deposition chamber enclosing an object to be treated;

    heating said source chamber, said deposition chamber, said object, and an upper portion of a recovery chamber to a temperature above the melting point of said surface treatment material;

    heating said surface treatment material in the presence of a carrier gas to evaporate said surface treatment material;

    exposing said object to said carrier gas and said evaporated surface treatment material;

    removing said carrier gas and said evaporated surface treatment material to said recovery chamber;

    recovering said evaporated surface treatment material in said recovery chamber;

    cooling a lower portion of said source chamber;

    heating a lower portion of said recovery chamber to evaporate said recovered surface treatment material into said carrier gas;

    transferring said evaporated recovered surface treatment material and said carrier gas into a second deposition chamber;

    removing said carrier gas and said evaporated recovered surface treatment material to said source chamber; and

    condensing said evaporated recovered surface treatment material in said lower portion of said source chamber.

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