Surface treatment material deposition and recapture
First Claim
1. A method of applying a surface treatment, said method comprising the steps of:
- providing a surface treatment material in a source chamber;
evacuating a deposition chamber enclosing an object to be treated;
heating said source chamber, said deposition chamber, said object, and an upper portion of a recovery chamber to a temperature above the melting point of said surface treatment material;
heating said surface treatment material in the presence of a carrier gas to evaporate said surface treatment material;
exposing said object to said carrier gas and said evaporated surface treatment material;
removing said carrier gas and said evaporated surface treatment material to said recovery chamber;
recovering said evaporated surface treatment material in said recovery chamber;
cooling a lower portion of said source chamber;
heating a lower portion of said recovery chamber to evaporate said recovered surface treatment material into said carrier gas;
transferring said evaporated recovered surface treatment material and said carrier gas into a second deposition chamber;
removing said carrier gas and said evaporated recovered surface treatment material to said source chamber; and
condensing said evaporated recovered surface treatment material in said lower portion of said source chamber.
1 Assignment
0 Petitions
Accused Products
Abstract
A method and system for applying a surface treatment to an object. The system comprises: a source chamber (106) for holding a source of surface treatment material (102); a deposition chamber (112) enclosing the object to be treated (104); a recovery chamber (108); a supply of carrier gas (110); conduit (116) connecting the source chamber (106) to the deposition chamber (112) and the deposition chamber (112) to the recovery chamber (108) and for controlling the flow of the carrier gas between the source chamber (106), the deposition chamber (112) and the recovery chamber; and a heater (124) for heating the source chamber (106), the source of surface treatment material (102), the deposition chamber (112), an upper portion (120) of the recovery chamber (108), the carrier gas, and the conduit (116). When heated, the source material (102) evaporates into the carrier gas and is carried to the deposition chamber (112) where is attaches to the surface of the object being treated (104). The depleted carrier gas is then delivered to the cooler lower portion (122) of the recovery chamber (108) where it condenses out of the carrier gas. After the supply of material (102) is depleted, the system flow is reversed to reuse the remaining source material (102). Throughout the deposition process, the carrier gas and all system surfaces are held above the condensation point of the source material-laden carrier gas to prevent unwanted deposition of the source material (102).
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Citations
14 Claims
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1. A method of applying a surface treatment, said method comprising the steps of:
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providing a surface treatment material in a source chamber;
evacuating a deposition chamber enclosing an object to be treated;
heating said source chamber, said deposition chamber, said object, and an upper portion of a recovery chamber to a temperature above the melting point of said surface treatment material;
heating said surface treatment material in the presence of a carrier gas to evaporate said surface treatment material;
exposing said object to said carrier gas and said evaporated surface treatment material;
removing said carrier gas and said evaporated surface treatment material to said recovery chamber;
recovering said evaporated surface treatment material in said recovery chamber;
cooling a lower portion of said source chamber;
heating a lower portion of said recovery chamber to evaporate said recovered surface treatment material into said carrier gas;
transferring said evaporated recovered surface treatment material and said carrier gas into a second deposition chamber;
removing said carrier gas and said evaporated recovered surface treatment material to said source chamber; and
condensing said evaporated recovered surface treatment material in said lower portion of said source chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
removing said object to be treated prior to said transferring step; and
replacing said object with a second object prior to said transferring step.
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10. A system for applying a surface treatment to an object, said system comprising:
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a source chamber for holding a source of surface treatment material;
a first deposition chamber enclosing a first object to be treated;
a second deposition chamber enclosing a second object to be treated;
a recovery chamber;
a supply of a carrier gas;
conduit connecting said source chamber to said deposition chambers and said deposition chambers to said recovery chamber and controlling the flow of said carrier gas between said source chamber, said deposition chambers and said recovery chamber; and
a heater for heating said source chamber, said source of surface treatment material, said deposition chambers, said recovery chamber, said carrier gas, and said conduit. - View Dependent Claims (11, 12, 13, 14)
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Specification