Efficient method of making micro-miniature switch device
First Claim
1. A method of making a micro-miniature switch device that has at least one member movable relative to a substrate upon which the device is provided, said method comprising:
- providing a layer of sacrificial non-photolithography material upon a stratum connected to the substrate;
photolithographing a photoresist material upon a stratum connected to the substrate to provide a template;
providing a layer to comprise at least a portion of the movable member; and
removing the photoresist material and the sacrificial non-photolithography material using photoresist developer.
5 Assignments
0 Petitions
Accused Products
Abstract
A method of making a micro-miniature switch device (10), which has at least one member (68) movable relative to a substrate (12) upon which the device is provided, includes providing a layer of sacrificial non-photolithography material upon a stratum connected to the substrate. A template is provided via photolithographing step that uses a photoresist material upon a stratum connected to the substrate. A layer is provided to include at least a portion of the movable member. The photoresist material and the sacrificial non-photolithography material are removed using photoresist developer. Preferably, at least two photolithography process steps utilize a single photolithographic mask. Also preferably, substrate material is removed to create a recess and at least one channel into the substrate, wherein the channel intersects the recess. At least a portion of the movable member is provided at a location within the recess and at least a portion of the movable member is provided at a location within the channel.
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Citations
29 Claims
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1. A method of making a micro-miniature switch device that has at least one member movable relative to a substrate upon which the device is provided, said method comprising:
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providing a layer of sacrificial non-photolithography material upon a stratum connected to the substrate;
photolithographing a photoresist material upon a stratum connected to the substrate to provide a template;
providing a layer to comprise at least a portion of the movable member; and
removing the photoresist material and the sacrificial non-photolithography material using photoresist developer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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- 13. A method of making a micro-miniature switch device that has at least one member movable relative to a substrate upon which the device is provided, said method including removing substrate material to create a recess and at least one channel into the substrate, the channel intersecting the recess, and providing at least a portion of the movable member at a location within the recess and providing at least a portion of the movable member at a location within the channel.
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20. A method of making a micro-miniature switch device that has at least one member movable relative to a substrate upon which the device is provided, said method including:
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(1) photolithographing a first photoresist material upon a stratum connected to a substrate to provide a template, the first photolithograph step using a photolithographic mask; and
(2) photolithographing a second photoresist material upon the stratum connected to the substrate to provide a template, the second photolithographic step using the same photolithographic mask as the photolithographic mask used for the first photolithographing step. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification