Micro-electro-mechanical optical device
First Claim
Patent Images
1. A micro-electro-mechanical optical device, comprising:
- a substrate having an optical device and an electro-mechanical structure disposed on a surface thereof wherein the electro-mechanical structure includes a plurality of beams, the beams having a first end coupled to the optical device and a second end coupled to the substrate and wherein the electro-mechanical structure lifts the optical device above the plane of the substrate surface in response to an activation force, and wherein the lifted optical device is movable relative to the plane of the substrate surface in response to the generation of an electrostatic field between the electro-mechanical structure and the substrate.
10 Assignments
0 Petitions
Accused Products
Abstract
An electro-mechanical structure which controls the movement of an optical device coupled thereto is disclosed. Both the electro-mechanical structure and the optical device are disposed on a substrate surface. The electro-mechanical structure controls the movement of the optical device by first lifting the optical device a predetermined distance above the plane of the substrate surface. Thereafter, the lifted optical device is moveable relative to the plane of the substrate surface in response to an electrostatic field generated between the electro-mechanical structure and the substrate.
-
Citations
23 Claims
-
1. A micro-electro-mechanical optical device, comprising:
a substrate having an optical device and an electro-mechanical structure disposed on a surface thereof wherein the electro-mechanical structure includes a plurality of beams, the beams having a first end coupled to the optical device and a second end coupled to the substrate and wherein the electro-mechanical structure lifts the optical device above the plane of the substrate surface in response to an activation force, and wherein the lifted optical device is movable relative to the plane of the substrate surface in response to the generation of an electrostatic field between the electro-mechanical structure and the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
12. An optical communication system, comprising:
-
a substrate having a micro-electro-mechanical optical device disposed on a surface thereof, wherein the micro-electro-mechanical optical device includes an optical device and a micro-electro-mechanical structure comprising a plurality of beams having a first end coupled to the optical device and a second end coupled to the substrate; and
wherein the micro-electro-mechanical structure lifts the optical device above the plane of the substrate surface in response to an activation force, and wherein the lifted optical device is movable relative to the plane of the substrate surface in response to the generation of an electric field between the micro-electro-mechanical structure and the substrate.
-
-
13. A method for moving an optical device, comprising the steps of:
-
providing a substrate having an optical device and a micro-electro-mechanical structure disposed on a surface thereof, wherein the micro-electro-mechanical structure includes a plurality of beams, wherein each beam has a first end coupled to the optical device and a second end coupled to the substrate;
lifting the optical device above the plane of the substrate surface by applying an activation force to the electro-mechanical structure; and
moving the lifted optical device relative to the plane of the substrate surface by generating an electric field between the micro-electro-mechanical structure and the substrate. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
-
Specification