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Micro-electro-mechanical optical device

  • US 6,366,414 B1
  • Filed: 09/03/1999
  • Issued: 04/02/2002
  • Est. Priority Date: 09/03/1999
  • Status: Expired due to Term
First Claim
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1. A micro-electro-mechanical optical device, comprising:

  • a substrate having an optical device and an electro-mechanical structure disposed on a surface thereof wherein the electro-mechanical structure includes a plurality of beams, the beams having a first end coupled to the optical device and a second end coupled to the substrate and wherein the electro-mechanical structure lifts the optical device above the plane of the substrate surface in response to an activation force, and wherein the lifted optical device is movable relative to the plane of the substrate surface in response to the generation of an electrostatic field between the electro-mechanical structure and the substrate.

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