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Microelectromechanical actuators including sinuous beam structures

  • US 6,367,252 B1
  • Filed: 07/05/2000
  • Issued: 04/09/2002
  • Est. Priority Date: 07/05/2000
  • Status: Expired due to Fees
First Claim
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1. A microelectromechanical actuator, comprising:

  • a substrate; and

    a beam having respective first and second ends attached to the substrate and a body disposed between the first and second ends having a sinuous shape, the body including a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam.

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