Microelectromechanical actuators including sinuous beam structures

• US 6,367,252 B1
• Filed: 07/05/2000
• Issued: 04/09/2002
• Est. Priority Date: 07/05/2000
• Status: Expired due to Fees

• Current Assignee: Memscap Incorporated
• Original Assignee: JDS Uniphase Corporation (Lumentum Holdings Inc.)
• Inventors: Cowen, Allen, Wood, Robert L., Mahadevan, Ramaswamy, Hill, Edward A., Dhuler, Vijayakumar Rudrappa
• Primary Examiner(s): NGUYEN, HOANG M
• Application Number:
  US09/610,047
• Time in Patent Office: 643 Days
• Field of Search: 605/27, 605/28, 310/306, 310/307, 310/309
• US Class Current: 60/528
• CPC Class Codes: B81B 2201/038 Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/056 Rotation in a plane parallel to the substrate
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay
• CPC Class Codes: H01H 61/00 Electrothermal relays thermal switches not operated by electrical input, thermal switches with anticipating electrical input H01H37/00; thermally-sensitive members H01H37/32

Abstract

In embodiments of the present invention, a microelectromechanical actuator includes a beam having respective first and second ends attached to a substrate and a body disposed between the first and second ends having a sinuous shape. The body includes a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam. The sinuous shape may be sinusoidal, e.g., a shape approximating a single period of a cosine curve or a single period of a sine curve. The beam may be thermally actuated or driven by another actuator. In other embodiments, a rotary actuator includes first and second beams, a respective one of which has first and second ends attached to a substrate and a body disposed between the first and second ends. Each body includes first and second oppositely inflected portions. The bodies of the first and second beams intersect one another at points at which the first and second oppositely inflected portions of the first and second bodies meet. The bodies of the first and second beams are operative to engage the object of actuation and rotate the object of actuation around the point of intersection responsive to at least one of compressive force and tensile force on the first and second beams. Related methods are also described.

Claims

1. A microelectromechanical actuator, comprising:

a substrate; and

a beam having respective first and second ends attached to the substrate and a body disposed between the first and second ends having a sinuous shape, the body including a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam.

2. An actuator according to claim 1, wherein the sinuous shape is sinusoidal.

3. An actuator according to claim 2, wherein the sinuous shape approximates a single period of a cosine curve.

4. An actuator according to claim 3, wherein the body comprises a medial portion that moves parallel to the substrate responsive to compressive force and/or tensile force on the beam.

5. An actuator according to claim 2, wherein the sinuous shape approximates a single period of a sine curve.

6. An actuator according to claim 5, wherein the body comprises first and second portions that move in respective opposite first and second directions parallel to the substrate responsive to compressive force and/or tensile force on the beam.

7. An actuator according to claim 1, wherein the first and second ends of the beam are fixedly attached to the substrate.

8. An actuator according to claim 7, wherein the beam is operative to generate at least one of a compressive force and a tensile force responsive to a temperature of the beam.

9. An actuator according to claim 1, wherein at least one of the first and second ends are attached to the substrate by at least one movable support.

10. An actuator according to claim 9, wherein the at least one movable support is operative to apply at least one of a compressive force and a tensile force to the beam.

11. An actuator according to claim 10, wherein the at least one movable support comprises an actuator beam.

12. An actuator according to claim 1, wherein the sinuous shape approximates a bending mode shape of a straight beam.

13. An actuator according to claim 12, wherein sinuous shape is a continuous approximation of the bending mode shape.

14. An actuator according to claim 12, wherein the sinuous shape is a piecewise approximation of the bending mode shape.

15. A microelectromechanical actuator, comprising:

a substrate; and

a beam having respective first and second ends attached to the substrate and a body disposed between the first and second ends, the body including a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam, the beam configured such that the body assumes a sinuous shape if freed from the substrate.

16. An actuator according to claim 15, wherein the sinuous shape is sinusoidal.

17. An actuator according to claim 16, wherein the sinuous shape approximates a single period of a cosine curve.

18. An actuator according to claim 17, wherein the body comprises a medial portion that moves parallel to the substrate responsive to compressive force and/or tensile force on the beam.

19. An actuator according to claim 16, wherein the sinuous shape approximates a single period of a sine curve.

20. An actuator according to claim 19, wherein the body comprises first and second portions that move in respective opposite first and second directions parallel to the substrate responsive to compressive force and/or tensile force on the beam.

21. An actuator according to claim 15, wherein the first and second ends of the beam are fixedly attached to the substrate.

22. An actuator according to claim 21, wherein the beam is operative to generate at least one of a compressive force and a tensile force responsive to a temperature of the beam.

23. An actuator according to claim 15, wherein at least one of the first and second ends are attached to the substrate by at least one movable support.

24. An actuator according to claim 23, wherein the at least one movable support is operative to apply at least one of a compressive force and a tensile force to the beam.

25. An actuator according to claim 24, wherein the at least one movable support comprises a beam structure.

26. An actuator according to claim 15, wherein the beam is configured such that the body assumes a shape approximating a bending mode shape if the body is freed from the substrate.

27. An actuator according to claim 26, wherein the beam is configured such that the body assumes a shape that is a continuous approximation of the bending mode shape if the body is freed from the substrate.

28. An actuator according to claim 26, wherein the beam is configured such that the body assumes a shape that is a piecewise approximation of the bending mode shape if the body is freed from the substrate.

29. A microelectromechanical rotary actuator, comprising:

a substrate; and

a beam having first and second ends attached to the substrate and a body disposed between the first and second ends, the body including first and second oppositely inflected portions meeting at a point between the first and second ends, the body operative to engage an object of actuation and rotate the object of actuation around the point at which the oppositely inflected portions meet responsive to at least one of a compressive force and a tensile force on the beam.

30. An actuator according to claim 29, wherein the first and second oppositely inflected portions are curved.

31. An actuator according to claim 30, wherein the body has a sinusoidal shape.

32. An actuator according to claim 31, wherein the body has a shape approximating a single period of a sine curve.

33. An actuator according to claim 29, wherein the beam comprises first and second beams, a respective one of which has first and second ends attached to the substrate and a body disposed between the first and second ends, each body including first and second oppositely inflected portions meeting at a point between the first and second ends, wherein the bodies of the first and second beams intersect one another at the points at which the first and second oppositely inflected portions of the bodies of the first and second beams meet and wherein the bodies of the first and second beams are operative to engage the object of actuation and rotate the object of actuation around the point at which the bodies of the first and second beams intersect responsive to at least one of compressive force and tensile force on the first and second beams.

34. A microelectromechanical rotary actuator, comprising:

a substrate; and

a beam having first and second ends attached to the substrate and a body disposed between the first and second ends, the body having a shape corresponding to a period of a sine curve, the body operative to engage an object of actuation and rotate the object of actuation responsive to at least one of a compressive force and a tensile force on the beam.

35. An actuator according to claim 34, wherein the beam comprises first and second beams, a respective one of which has first and second ends attached to the substrate and a body disposed between the first and second ends, each body having a shape approximating a period of a sine curve, wherein the bodies of the first and second beams intersect one another at inflection points of the bodies of the first and second beams, and wherein the bodies of the first and second beams are operative to engage the object of actuation and rotate the object of actuation around the point at which the bodies of the first and second beams intersect responsive to at least one of compressive force and tensile force on the first and second beams.

36. A microstructure, comprising:

a substrate;

a sacrificial layer on the substrate;

a beam having respective first and second ends attached to the substrate and a sinusoidal body disposed between the first and second ends and on the sacrificial layer.

37. A microstructure according to claim 36, wherein the sinusoidal body has a shape approximating a period of a cosine curve.

38. A microstructure according to claim 36, wherein the sinusoidal body has a shape approximating a period of a sine curve.

39. A microstructure, comprising:

a substrate;

a sacrificial layer on the substrate; and

a beam having respective first and second ends attached to the substrate and a body disposed between the first and second ends and disposed on the sacrificial layer, the body having a shape approximating a bending mode shape.

40. A microstructure according to claim 39, wherein the shape of the body is a substantially continuous approximation of the bending mode shape.

41. A microstructure according to claim 39, wherein the shape of the body is a piecewise approximation of the bending mode shape.

42. A microstructure according to claim 39, wherein the shape of the body approximates a period of a sine curve.

43. A microstructure according to claim 39, wherein the shape of the body approximates a period of a cosine curve.

44. A method of fabricating a microstructure, the method comprising:

forming a sacrificial layer on a substrate;

forming a beam having respective first and second ends attached to the substrate and a sinusoidal body disposed between the first and second ends and on the sacrificial layer;

removing at least a portion of the sacrificial layer to release the sinusoidal body.

45. A method according to claim 44, wherein the sinusoidal body has a shape approximating a period of a cosine curve.

46. A method according to claim 44, wherein the sinusoidal body has a shape approximating a period of a sine curve.

47. A method according to claim 44, wherein the step of forming a beam comprises:

forming a layer on the sacrificial layer; and

patterning the layer to form the beam.

48. A method of fabricating a microstructure, the method comprising:

forming a sacrificial layer on a substrate;

forming a beam having respective first and second ends attached to the substrate and a body disposed between the first and second ends and disposed on the sacrificial layer, the body having a shape approximating a bending mode shape.

49. A method according to claim 48, wherein the shape of the body is a substantially continuous approximation of the bending mode shape.

50. A method according to claim 48, wherein the beam shape is a piecewise approximation of the bending mode shape.

51. A method according to claim 48, wherein the shape of the body approximates a period of a sine curve.

52. A method according to claim 48, wherein the shape of the body approximates a period of a cosine curve.

53. A method according to claim 48, wherein the step of forming a beam comprises:

forming a layer on the sacrificial layer; and

patterning the layer to form the beam.

54. A method of rotating an object of actuation, the method comprising:

engaging the object of actuation with a beam having first and second ends attached to a substrate and a body disposed between the first and second ends, the body including first and second oppositely inflected portions meeting at a point between the first and second ends; and

applying one of a compressive force or a tensile force to the beam to rotate the object of actuation around the point at which the oppositely inflected portions meet.

55. A method according to claim 54, wherein the first and second oppositely inflected portions are curved.

56. A method according to claim 55, wherein the body has a sinusoidal shape.

57. A method according to claim 56, wherein the body has a shape approximating a single period of a sine curve.

58. A method according to claim 54:

wherein the step of engaging comprises the step of engaging the object of actuation with first and second beams, a respective one of which has first and second ends attached to the substrate and a body disposed between the first and second ends, each body including first and second oppositely inflected portions meeting at a point between the first and second ends, wherein the bodies of the first and second beams intersect one another at the points at which the first and second oppositely inflected portions of the first and second bodies meet; and

wherein said step of applying comprises the step of applying respective compressive or tensile forces to the first and second beams to rotate the object of actuation around the point at which the first and second bodies intersect.