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Micromachined double resonator

  • US 6,367,786 B1
  • Filed: 06/06/2000
  • Issued: 04/09/2002
  • Est. Priority Date: 06/07/1999
  • Status: Active Grant
First Claim
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1. A micromachined resonator mountable to an external support structure comprising:

  • a proof mass suspended by a first spring structure;

    a base structure to which the proof mass is coupled, the base structure including a plurality of electrodes; and

    a second spring structure coupling the base structure to the external support structure.

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