Apparatus for determining metal CMP endpoint using integrated polishing pad electrodes

• US 6,368,184 B1
• Filed: 01/06/2000
• Issued: 04/09/2002
• Est. Priority Date: 01/06/2000
• Status: Expired due to Term

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Beckage, Peter J.
• Primary Examiner(s): Eley, Timothy V.
• Application Number:
  US09/480,732
• Time in Patent Office: 824 Days
• Field of Search: 324/71.5, 324/671, 324/688, 451/4, 451/6, 451/8, 451/9, 451/41, 451/65, 451/67, 451/527, 451/548, 451/550
• US Class Current: 451/9
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: B24B 37/12 Lapping plates for working plane surfaces
• CPC Class Codes: B24B 37/20 Lapping pads for working plane surfaces
• CPC Class Codes: B24B 49/04 involving measurement of the workpiece at the place of grinding during grinding operation
• CPC Class Codes: B24B 49/10 involving electrical means B24B49/02, B24B49/08 take precedence

Abstract

A polishing system includes a polishing tool having a platen, a polishing pad, and a controller. The platen is adapted to have the polishing pad attached thereto. The polishing pad includes a polishing surface and a back surface that is opposite the polishing surface. At least one sender electrode and at least one response electrode is disposed in the polishing pad. The controller is coupled to the polishing tool. A method includes polishing a conductive process layer of a wafer using a polishing pad of a polishing tool having at least one sender electrode and at least one response electrode disposed therein. A signal is provided to the at least one sender electrode. The signal provided to the at least one sender electrode is monitored with at least one of a group of the at least one response electrode, the at least one response electrode communicating with the at least one sender electrode through the conductive process layer of the wafer. Endpoint of the polishing process is determined based on the signal received by the at least one response electrode.

Claims

1. A polishing pad of a polishing tool, comprising:

a polishing surface;

a back surface that is opposite the polishing surface;

at least one sender electrode disposed in the polishing pad, said at least one sender electrode being comprised of a first end positioned proximate the polishing surface, and a second end positioned proximate the back surface, the first end of the at least one sender electrode being comprised of a brush; and

at least one response electrode disposed in the polishing pad, the at least one response electrode adapted to communicate with the at least one sender electrode through a conductive process layer of a wafer during a polishing process.

2. The polishing pad of claim 1, wherein the first end of the at least one sender electrode is substantially planar with the polishing surface.

3. The polishing pad of claim 1, wherein the second end of the at least one sender electrode is substantially planar with the back surface.

4. The polishing pad of claim 1, wherein the at least one response electrode is comprised of a first end positioned proximate the polishing surface, and a second end positioned proximate the back surface.

5. The polishing pad of claim 4, wherein the first end of the at least one response electrode is substantially planar with the polishing surface.

6. The polishing pad of claim 4, wherein the first end of the at least one response electrode is comprised of a brush.

7. The polishing pad of claim 4, wherein the second end of the at least one response electrode is substantially planar with the back surface.

8. The polishing pad of claim 1, wherein the at least one response electrode and the at least one sender electrode are comprised of the same material as the conductive process layer of the wafer.

9. The polishing pad of claim 1, wherein the at least one response electrode and the at least one sender electrode are comprised of at least one of the group of graphite, polysilicon, aluminum, gold, and copper.

10. A polishing system, comprising:

a polishing tool having a platen and a polishing pad, said platen adapted to have said polishing pad attached thereto, the polishing pad comprising;

a polishing surface;

a back surface that is opposite the polishing surface;

at least one sender electrode disposed in the polishing pad;

at least one response electrode disposed in the polishing pad;

at least one power supply plane positioned on said platen, said at least one sender electrode being aligned with said at least one power supply plane; and

a controller coupled to the polishing tool.

11. The polishing system of claim 10, further comprising at least one contact positioned on the platen.

12. The polishing system of claim 11, wherein said at least one contact is comprised of at least one of the group of copper, aluminum, and gold.

13. The polishing system of claim 11 wherein said at least one response electrode comprises a second end and wherein an arrangement of the at least one contact corresponds with an arrangement of at least a portion of the at least one response electrode disposed in the polishing pad, and an electrical connection is established between the at least one contact and the second end of the at least one response electrode when the polishing pad is mated to the platen.

14. The polishing system of claim 10, wherein said at least one power supply plane positioned on the platen has a ring configuration defined by an inner edge and an outer edge.

15. The polishing system of claim 14, wherein said at least one sender electrode comprises a second end and wherein the location of the at least one power supply plane corresponds with an arrangement of the at least one sender electrode disposed in the polishing pad, and an electrical connection is established between the at least one power supply plane and the second end of the at least one sender electrode when the polishing pad is mated to the platen.

16. The polishing system of claim 10, wherein the at least one response electrode and the at least one sender electrode are comprised of the same material as the conductive process layer of the wafer.

17. The polishing system of claim 10, wherein the at least one sender electrode has a first end that is positioned proximate the polishing surface, and a second end that is positioned proximate the back surface.

18. The polishing system of claim 17, wherein the first end of the at least one sender electrode is substantially planar to the polishing surface of the polishing pad, and the second end of the at least one sender electrode is substantially planar to the back surface of the polishing pad.

19. The polishing system of claim 10, wherein the at least one response electrode has a first end that is positioned proximate the polishing surface, and a second end that is positioned proximate the back surface.

20. The polishing system of claim 19, wherein the first end of the at least one response electrode is substantially planar to the polishing surface of the polishing pad, and the second end of the at least one response electrode is substantially planar to the back surface of the polishing pad.

21. The polishing tool of claim 10, wherein the controller is adapted to:

provide a signal to the at least one sender electrode during a polishing process;

monitor the signal provided to the at least one sender electrode by monitoring the at least one response electrode, the at least one response electrode communicating with the at least one sender electrode through a conductive process layer of a wafer; and

determine endpoint of the polishing process based on the signal received by the at least one response electrode.

22. The polishing process of claim 21, wherein the controller is adapted to:

monitor at least one response electrode of the polishing pad;

calculate a number of the at least one response electrode not receiving the signal from the at least one sender electrode; and

determine endpoint of the polishing process based on a predetermined percentage of the at least one response electrodes not receiving the signal.

23. The polishing system of claim 21, wherein the controller is adapted to:

monitor the signal received by at least one response electrode;

measure a change in an electrical characteristic of the signal provided to the at least one sender electrode and the signal received by the at least one response electrode;

determine endpoint of the polishing process based on a predetermined change in an electrical characteristic of the signal.

24. A polishing pad of a polishing tool, comprising:

a polishing surface;

a back surface that is opposite the polishing surface;

at least one sender electrode disposed in the polishing pad, said at least one sender electrode being comprised of a first end positioned proximate the polishing surface, and a second end positioned proximate the back surface, the second end of the sender electrode being substantially planar with the back surface; and

at least one response electrode disposed in the polishing pad, the at least one response electrode adapted to communicate with the at least one sender electrode through a conductive process layer of a wafer during a polishing process.

25. The polishing pad of claim 24, wherein the first end of the sender electrode is substantially planar with the polishing surface.

26. The polishing pad of claim 24, wherein the first end of the sender electrode is comprised of a brush.

27. The polishing pad of claim 24, wherein the at least one response electrode is comprised of a first end positioned proximate the polishing surface, and a second end positioned proximate the back surface.

28. The polishing pad of claim 27, wherein the first end of the at least one response electrode is substantially planar with the polishing surface.

29. The polishing pad of claim 27, wherein the first end of the at least one response electrode is comprised of a brush.

30. The polishing pad of claim 27, wherein the second end of the at least one response electrode is substantially planar with the back surface.

31. The polishing pad of claim 24, wherein the at least one response electrode and the at least one sender electrode are comprised of the same material as the conductive process layer of the wafer.

32. The polishing pad of claim 24, wherein the at least one response electrode and the at least one sender electrode are comprised of at least one of the group of graphite, polysilicon, aluminum, gold, and copper.

33. A polishing pad of a polishing tool, comprising:

a polishing surface;

a back surface that is opposite the polishing surface;

at least one sender electrode disposed in the polishing pad; and

at least one response electrode disposed in the polishing pad, the at least one response electrode adapted to communicate with the at least one sender electrode through a conductive process layer of a wafer during a polishing process, said at least one response electrode being comprised of a first end positioned proximate the polishing surface, and a second end positioned proximate the back surface, the first end of the at least one response electrode being comprised of a brush.

34. The polishing pad of claim 33, wherein the at least one sender electrode is comprised of a first end positioned proximate the polishing surface, and a second end positioned proximate the back surface.

35. The polishing pad of claim 34, wherein the first end of the at least one sender electrode is substantially planar with the polishing surface.

36. The polishing pad of claim 34, wherein the first end of the at least one sender electrode is comprised of a brush.

37. The polishing pad of claim 34, wherein the second end of the at least one sender electrode is substantially planar with the back surface.

38. The polishing pad of claim 33, wherein the first end of the at least one response electrode is substantially planar with the polishing surface.

39. The polishing pad of claim 33, wherein the second end of the at least one response electrode is substantially planar with the back surface.

40. The polishing pad of claim 33, wherein the at least one response electrode and the at least one sender electrode are comprised of the same material as the conductive process layer of the wafer.

41. The polishing pad of claim 33, wherein the at least one response electrode and the at least one sender electrode are comprised of at least one of the group of graphite, polysilicon, aluminum, gold, and copper.

42. A polishing pad of a polishing tool, comprising:

a polishing surface;

a back surface that is opposite the polishing surface;

at least one sender electrode disposed in the polishing pad; and

at least one response electrode disposed in the polishing pad, the at least one response electrode adapted to communicate with the at least one sender electrode through a conductive process layer of a wafer during a polishing process, said at least one response electrode being comprised of a first end positioned proximate the polishing surface, and a second end positioned proximate the back surface, the second end of the at least one response electrode being substantially planar with the back surface.

43. The polishing pad of claim 42, wherein the at least one sender electrode is comprised of a first end positioned proximate the polishing surface, and a second end positioned proximate the back surface.

44. The polishing pad of claim 43, wherein the first end of the at least one sender electrode is substantially planar with the polishing surface.

45. The polishing pad of claim 43, wherein the first end of the at least one sender electrode is comprised of a brush.

46. The polishing pad of claim 43, wherein the second end of the at least one sender electrode is substantially planar with the back surface.

47. The polishing pad of claim 42, wherein the first end of the at least one response electrode is substantially planar with the polishing surface.

48. The polishing pad of claim 42, wherein the first end of the at least one response electrode is comprised of a brush.

49. The polishing pad of claim 42, wherein the at least one response electrode and the at least one sender electrode are comprised of the same material as the conductive process layer of the wafer.

50. The polishing pad of claim 42, wherein the at least one response electrode and the at least one sender electrode are comprised of at least one of the group of graphite, polysilicon, aluminum, gold, and copper.