Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions
First Claim
1. A method for dispersing a plurality of reactant gases into a processing space of a reaction chamber, the method comprising:
- delivering a first gas into a first gas space of a generally planar showerhead located in a reaction chamber, the showerhead having a face surface;
delivering a second gas into a second gas space of said showerhead, the second space being physically isolated from the first space within the showerhead;
spreading the second gas over a generally planar second gas space which is open over a majority of the showerhead face surface for distributing the second gas over a majority of the face surface, and dispersing the second gas through gas-dispersing passages positioned over the face surface and coupled to the second gas space;
directing the first gas into a peripheral area of the first gas space and into a plurality of elongated gas distribution passages extending from the peripheral area and through the showerhead generally side-by-side with adjacent passages, and dispersing the first gas through gas-dispersing passages positioned over the face surface and coupled to the elongated gas distribution passages;
maintaining said first and second gases segregated from one another in the first and second spaces of the showerhead;
whereby the gases are dispersed to react in the processing space and are generally prevented from reacting before they enter the processing space.
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Abstract
A method and apparatus for depositing a film by chemical vapor deposition comprises a showerhead for dispersing reactant gases into the processing space wherein the showerhead has a first space therein operable for receiving and dispersing the first reacting gas, and has a second space therein, generally isolated from the first space, and operable for receiving and dispersing the second reactant gas separate from the first gas dispersion for maintaining segregation of reactant gases and generally preventing premature mixture of the gases prior to their introduction into the processing space to prevent premature deposition in the system.
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Citations
11 Claims
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1. A method for dispersing a plurality of reactant gases into a processing space of a reaction chamber, the method comprising:
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delivering a first gas into a first gas space of a generally planar showerhead located in a reaction chamber, the showerhead having a face surface;
delivering a second gas into a second gas space of said showerhead, the second space being physically isolated from the first space within the showerhead;
spreading the second gas over a generally planar second gas space which is open over a majority of the showerhead face surface for distributing the second gas over a majority of the face surface, and dispersing the second gas through gas-dispersing passages positioned over the face surface and coupled to the second gas space;
directing the first gas into a peripheral area of the first gas space and into a plurality of elongated gas distribution passages extending from the peripheral area and through the showerhead generally side-by-side with adjacent passages, and dispersing the first gas through gas-dispersing passages positioned over the face surface and coupled to the elongated gas distribution passages;
maintaining said first and second gases segregated from one another in the first and second spaces of the showerhead;
whereby the gases are dispersed to react in the processing space and are generally prevented from reacting before they enter the processing space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification