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Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions

  • US 6,368,987 B1
  • Filed: 06/06/2000
  • Issued: 04/09/2002
  • Est. Priority Date: 09/30/1997
  • Status: Expired due to Fees
First Claim
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1. A method for dispersing a plurality of reactant gases into a processing space of a reaction chamber, the method comprising:

  • delivering a first gas into a first gas space of a generally planar showerhead located in a reaction chamber, the showerhead having a face surface;

    delivering a second gas into a second gas space of said showerhead, the second space being physically isolated from the first space within the showerhead;

    spreading the second gas over a generally planar second gas space which is open over a majority of the showerhead face surface for distributing the second gas over a majority of the face surface, and dispersing the second gas through gas-dispersing passages positioned over the face surface and coupled to the second gas space;

    directing the first gas into a peripheral area of the first gas space and into a plurality of elongated gas distribution passages extending from the peripheral area and through the showerhead generally side-by-side with adjacent passages, and dispersing the first gas through gas-dispersing passages positioned over the face surface and coupled to the elongated gas distribution passages;

    maintaining said first and second gases segregated from one another in the first and second spaces of the showerhead;

    whereby the gases are dispersed to react in the processing space and are generally prevented from reacting before they enter the processing space.

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