Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions

• US 6,368,987 B1
• Filed: 06/06/2000
• Issued: 04/09/2002
• Est. Priority Date: 09/30/1997
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: LeBlanc, Rene Emile, Hillman, Joseph Todd, Webb, Douglas Arthur, Rowan, Robert Clark Jr., Leusink, Gerrit Jan, Foster, Robert F., Kopacz, Stanislaw, Ameen, Michael S.
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): Zervigon, Rudy
• Application Number:
  US09/587,916
• Time in Patent Office: 672 Days
• Field of Search: 118/715, 118/723.E, 427/248.1, 427/534, 427/538, 427/570, 438/710, 438/158, 438/485, 438/631, 438/696, 438/788, 204/192.12, 204/192.15, 204/192.26, 204/192.3, 204/192.32, 204/298.11, 204/298.33, 219/121.43
• US Class Current: 438/788
• CPC Class Codes: C23C 16/45514 Mixing in close vicinity to the substrate
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus

Abstract

A method and apparatus for depositing a film by chemical vapor deposition comprises a showerhead for dispersing reactant gases into the processing space wherein the showerhead has a first space therein operable for receiving and dispersing the first reacting gas, and has a second space therein, generally isolated from the first space, and operable for receiving and dispersing the second reactant gas separate from the first gas dispersion for maintaining segregation of reactant gases and generally preventing premature mixture of the gases prior to their introduction into the processing space to prevent premature deposition in the system.

Claims

1. A method for dispersing a plurality of reactant gases into a processing space of a reaction chamber, the method comprising:

delivering a first gas into a first gas space of a generally planar showerhead located in a reaction chamber, the showerhead having a face surface;

delivering a second gas into a second gas space of said showerhead, the second space being physically isolated from the first space within the showerhead;

spreading the second gas over a generally planar second gas space which is open over a majority of the showerhead face surface for distributing the second gas over a majority of the face surface, and dispersing the second gas through gas-dispersing passages positioned over the face surface and coupled to the second gas space;

directing the first gas into a peripheral area of the first gas space and into a plurality of elongated gas distribution passages extending from the peripheral area and through the showerhead generally side-by-side with adjacent passages, and dispersing the first gas through gas-dispersing passages positioned over the face surface and coupled to the elongated gas distribution passages;

maintaining said first and second gases segregated from one another in the first and second spaces of the showerhead;

whereby the gases are dispersed to react in the processing space and are generally prevented from reacting before they enter the processing space.

2. The method of claim 1 wherein said gas-dispersing passages are positioned spaced along each elongated passage for uniformly dispersing a first gas from the showerhead.

3. The method of claim 1 further comprising directing the first gas to the peripheral area through a single inlet port.

4. The method of claim 1 further comprising directing the first gas into a peripheral area including a peripheral channel in the showerhead for distributing the first gas around the periphery of the showerhead.

5. The method of claim 1 further comprising directing the first gas into a plurality of gas distribution fingers extending in the showerhead from the peripheral channel for distributing the first gas around the showerhead.

6. The method of claim 1 further comprising biasing the showerhead with RF energy to form a plasma from one of said first and second gases.

7. The method of claim 1 wherein said peripheral area is common to all of the elongated gas distribution passages.

8. The method of claim 1 wherein said first and second gas spaces are oriented in a stacked formation in the showerhead.

9. The method of claim 1 wherein said first gas space distribution passages are generally horizontally co-planar.

10. The method of claim 1 wherein said generally planar second gas space is generally unitary within a generally horizontal plane.

11. The method of claim 1 wherein each of said elongated gas distribution passages extends from a side of the showerhead to an opposite side of the showerhead to uniformly distribute the first gas.