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SPM base focal plane positioning

  • US 6,369,397 B1
  • Filed: 01/04/1999
  • Issued: 04/09/2002
  • Est. Priority Date: 01/04/1999
  • Status: Expired due to Fees
First Claim
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1. A method for accurate photolithography tool Z axis positioning comprising:

  • providing a photolithography tool having a scanned probe microscope mounted directly to the lens system hardware;

    determining a focal plane using calibration wafers;

    positioning a wafer at the scanner probe microscope tip; and

    driving a stage to move the wafer to the determined focal plane.

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