Method for manufacturing a micromechanical device

• US 6,369,931 B1
• Filed: 08/18/1999
• Issued: 04/09/2002
• Est. Priority Date: 12/22/1997
• Status: Expired due to Term

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Funk, Karsten, Frey, Wilhelm
• Primary Examiner(s): Gulakowski, Randy
• Assistant Examiner(s): SMETANA, JIRI F
• Application Number:
  US09/367,760
• Time in Patent Office: 965 Days
• Field of Search: 216/2, 216/24, 216/26, 216/58, 216/67, 359/223, 359/224, 359/318, 257/414, 257/415
• US Class Current: 359/223.1
• CPC Class Codes: B81B 2201/0292 Sensors not provided for in B81B2201/0207 - B81B2201/0285
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/004 Angular deflection
• CPC Class Codes: B81C 1/00142 Bridges deformable micromirrors G02B26/0841
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A method for manufacturing a micromechanical device, in particular a micromechanical vibrating-mirror device, having the following steps: making available a three-layer structure having a first layer, a second layer and a third layer, the second layer lying between the first and the third layers; etching through the first layer up to the second layer to produce an island region, lying on the second layer, which is joined to region of the first layer surrounding the island region by way of one or more connecting webs, and etching through a region of the third layer up to the second layer and removing a region of the second layer below the island region in such a way that the island region can perform movements, preferably torsional vibrations, about the one or more connecting webs, the torsional vibrations having such an amplitude that a part of the island region extends into the etched-through region of the third layer.

Claims

1. A method for manufacturing a micromechanical device, comprising the steps of:

a) providing a three-layer structure which has a first layer, a second layer and a third layer, the second layer being disposed between the first layer and the third layer;

b) etching through the first layer to the second layer to form an island region which is disposed on the second layer, the first layer including a first region which surrounds the island region and which joins the island region via at least one connecting web;

c) etching through a second region, wherein the second region is part of the third layer and extends to the second layer; and

d) removing a third region, wherein the third region is part of the second layer and disposed below the island region, wherein the removing is for enabling the island region to perform torsional vibrations about the at least one connecting web, the torsional vibrations having an amplitude for enabling a portion of the island region to extend into the second region.

2. The method according to claim 1, wherein step (c) is performed after step (b), and step (d) is performed after step (c).

3. The method according to claim 2, wherein step (c) includes the substep of anisotropic etching a back surface of the third layer.

4. The method according to claim 1, wherein step (a) includes the substep of dry etching the first layer to the second layer.

5. The method according to claim 1, wherein step (b) is performed before step (d), and step (d) is performed before step (c).

6. The method according to claim 5, wherein step (c) includes the substeps of:

I. anodic etching a back surface of the third layer so as to make at least a portion of the second region porous, and

II. after substep 1, removing the porous portion.

7. The method according to claim 6, wherein step (d) includes the substep of removing at least a portion of the third region directly in an anodizing electrolyte.

8. The method according to claim 11, further comprising the steps of:

e) applying counter-electrodes on a base; and

f) bonding the base to the third layer for enabling the counter-electrodes to lie opposite to the island region.

9. The method according to claim 1, wherein the first layer is a silicon-on-insulator (SOI) layer, the second layer is an insulating layer, and the third layer is a silicon substrate layer.

10. The method according to claim 1, wherein the first layer includes at least one narrow region which remain after step (c), the at least one narrow region forming the at least one connecting web.

11. The method according to claim 1, further comprising the step of:

h) providing a further region which includes at least one narrow region, the at least one narrow region forming the at least one connecting web.

12. The method according to claim 11, wherein the further region is composed of a metallic material.

13. The method according to claim 1, wherein the micromechanical device includes a micromechanical vibrating-mirror device.

14. The method according to claim 1, wherein step (b) is performed after step (c), and step (d) is performed after step (b).