Remote semiconductor microscopy

• US 6,370,487 B1
• Filed: 04/23/1999
• Issued: 04/09/2002
• Est. Priority Date: 04/23/1998
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Dorough, Michael J.
• Primary Examiner(s): Hoff, Marc S.
• Assistant Examiner(s): TSAI, CAROL S W
• Application Number:
  US09/298,502
• Time in Patent Office: 1,082 Days
• Field of Search: 702/33-36, 702/40, 702/58, 702/59, 702/81-84, 702/117-119, 702/121-124, 702/126, 702/170, 702/172, 702/183-185, 702/188, 702/189, 702/198, 702/FOR.103, 702/FOR.104, 702/FOR-123, 702/FOR.131, 702/FOR.134, 702/FOR.135, 702/FOR.137, 702/FOR.148, 702/FOR.170, 702/FOR.171, 700/121, 250/306, 250/310, 250/397, 382/145, 348/79, 345/473, 345/474, 345/475, 345/952, 345/953, 345/959
• US Class Current: 702/188
• CPC Class Codes: G02B 21/365 Control or image processing arrangements for digital or video microscopes G02B21/361, G02B21/362 take precedence
• CPC Class Codes: G16H 10/40 for data related to laboratory analysis, e.g. patient specimen analysis
• CPC Class Codes: G16H 80/00 ICT specially adapted for facilitating communication between medical practitioners or patients, e.g. for collaborative diagnosis, therapy or health monitoring
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H04N 7/181 for receiving images from a plurality of remote sources
• CPC Class Codes: Y10S 977/854 Semiconductor sample

Abstract

A method and apparatus are described for remote semiconductor microscopy whereby video signals are broadcast from one or more microscopes to remote viewers. A live video signal is broadcast from the microscope over a network to remote personal computers located in the offices of process engineers. The office-based process engineers are provided real-time, or substantially real-time, views of a wafer, including peripheral views of the wafer outside cell array boundaries. The process engineer, in his office, can direct a technician, operating the microscope in the clean room complex, to display a desired cell region-of-interest with the microscope. As a result, the process engineers can more efficiently collaborate to solve process problems or even develop new process techniques.

Claims

1. An inspection system comprising

a microscope generating a video signal from a view of a semiconductor wafer;

a video capture system to digitize the video signal;

a server coupled to the video capture system to store the digitized video signal and operable for comparing the digitized video signal to statistical data in order to detect a change from a first frame to a successive frame, the server further operable for retransmitting a previously broadcast frame as a function of the comparison; and

one or more client computers communicatively coupled to the server to receive and display the digitized video from the server.

2. The inspection system of claim 1 wherein the server streams the digitized video signal to the client computers.

3. The inspection system of claim 1, wherein the video capture system generates a plurality of digitized frames, each frame of analog video corresponding to one scan of the microscope.

4. The inspection system of claim 3, wherein the microscope is a scanning electron microscope.

5. The inspection system of claim 3, wherein the microscope is a scanning tunneling microscope.

6. The inspection system of claim 1, wherein the video capture system includes an encoder-decoder (CODEC) to compress the digitized video signals.

7. An inspection system comprising

a microscope generating a video signal of a view of a semiconductor wafer;

a video capture system generates a plurality of digitized frames from the video signal, wherein each frame has a unique identifier; and

a server coupled to the video capture system to store each digitized frame according to the corresponding unique identifier wherein the server is further operable for detecting a change from a first frame to a successive frame of the digitized frames, the server further operable for retransmitting a previously broadcast frame as a function of the detecting the change.

8. The inspection system of claim 7 wherein the unique identifiers are stored within a database on the server.

9. An inspection system comprising:

a microscope generating a video signal of a view of a semiconductor wafer;

a video capture system generates a plurality of digitized frames from the video signal, wherein each frame has a unique identifier; and

a server coupled to the video capture system to store each digitized frame according to the corresponding unique identifier; and

wherein the digitized frames are stored in an Advanced Streaming format (ASF) on the server.

10. A semiconductor wafer microscopy system comprising:

a microscope generating a video signal of a microscopic view of a semiconductor wafer;

a video capture system to digitize the video signal and to produce therefrom a digitized video signal;

a client computer communicatively coupled to the video capture system via a wide area network, wherein the video capture system communicates the digitized video signal to the client computer via the wide area network; and

wherein the video capture system is further operable for comparing the digitized video signal to statistical data in order to detect a change from a first frame to a successive frame, the video capture system is further operable for retransmitting a previously broadcast frame as a function of the comparison.

11. The semiconductor wafer microscopy system of claim 10 wherein the video capture system includes a computer having a video capture card.

12. The semiconductor wafer microscopy system of claim 10 wherein the video capture system uses a transport control protocol-Internet protocol (TCP-IP) to communicate the digitized video signal to the client computer.

13. The semiconductor wafer microscopy system of claim 10 wherein the wide area network is the Internet.

14. The semiconductor wafer microscopy system of claim 10, wherein the video capture system streams the digitized video signal to the client computer.

15. The semiconductor wafer microscopy system of claim 10, wherein the microscope is a scanning electron microscope.

16. A semiconductor wafer microscopy system comprising

a microscope generating a video signal of a microscopic view of a semiconductor wafer;

a computer having video capture hardware to digitize the video signal, and producing therefrom a digitized video signal;

a software system executing on the computer to process the digitized video for communication to one or more remote computers via a network; and

wherein the software system is further operable for comparing the digitized video signal to statistical data in order to detect a change from a first frame to a successive frame, the software system is further operable for retransmitting a previously broadcast frame as a function of the comparison.

17. The semiconductor wafer microscopy system of claim 16, wherein the software system conforms to the Component Object Model (COM).

18. The semiconductor wafer microscopy system of claim 16, wherein the software system is implemented with object-oriented software.

19. The semiconductor wafer microscopy system of claim 16, wherein the software system compresses the digitized video signals.

20. The semiconductor wafer microscopy system of claim 16, wherein the software system compares a predefined threshold to statistical data of the processed digitized video signal in order to detect a change from a first frame to a successive frame.

21. A semiconductor wafer microscopy system, comprising:

a microscope generating a video signal of a microscopic view of a semiconductor wafer;

a computer having video capture hardware to digitize the video signal,

a software system executing on the computer to process the digitized video for communication to one or more remote computers via a network;

wherein the software system compares a predefined threshold to statistical data of the processed digitized video signal in order to detect a change from a first frame to a successive frame; and

wherein the software system retransmits a previously broadcast frame as a function of the comparison.

22. A computerized method for inspecting semiconductor wafers comprising:

generating a video signal of a microscopic view of the semiconductor wafer;

digitizing the video signal to produce a digitized video signal;

communicating the digitized video signal to one or more remote client computers via a network;

detecting a change from a first frame to a successive frame in the digitized video signal; and

retransmitting a previously broadcast frame if no change is detected between the first frame and the successive frame.

23. The method of claim 22 wherein communicating the digitized video signal includes streaming the video signal.

24. The method of claim 22 wherein communicating the digitized video signal includes communicating the digitized video signal over a wide area network.

25. The method of claim 24 wherein communicating the digitized video signal includes communicating the digitized video signal over the Internet.

26. The method of claim 24 wherein communicating the digitized video signal includes communicating the digitized video using a transport control protocol-Internet protocol.

27. The method of claim 22 wherein communicating the digitized video signal includes compressing the digitized video signal.

28. A computerized method for inspecting semiconductor wafers, comprising:

generating a video signal of a microscopic view of the semiconductor wafer;

digitizing the video signal; and

communicating the digitized video signal to one or more remote client computers via a network, wherein communicating the digitized video signal includes;

processing the digitized video signal;

comparing a predefined threshold to statistical data of the processed digitized video signal in order to detect a change from a first frame to a successive frame; and

retransmitting the first frame instead of the successive frame as a function of the comparison.

29. A computer-readable medium having computer-executable instructions to cause a computer to perform a method of:

generating a video signal of a microscopic view of a semiconductor wafer;

digitizing the video signal to produce a digitized video signal;

communicating the digitized video signal to one or more remote client computers via a network;

detecting a change from a first frame to a successive frame in the digitized video signal; and

retransmitting a previously broadcast frame if no change is detected between the first frame and the successive frame.

30. The computer-readable medium of claim 29 wherein communicating the digitized video signal includes streaming the video signal.

31. The computer-readable medium of claim 29 wherein communicating the digitized video signal includes communicating the digitized video signal over a wide area network.

32. The computer-readable medium of claim 29 wherein communicating the digitized video signal includes communicating the digitized video signal includes communicating the digitized video signal over the Internet.

33. The computer-readable medium of claim 29 wherein communicating the digitized video signal includes compressing the digitized video signal.

34. A computer-readable medium having computer-executable instructions to cause a computer to perform a method of:

generating a video signal of a microscopic view of a semiconductor wafer;

digitizing the video signal; and

communicating the digitized video signal to one or more remote client computers via a network, wherein communicating the digitized video signal includes;

processing the digitized video signal;

comparing a predefined threshold to statistical data of the processed digitized video signal in order to detect a change from a first frame to a successive frame; and

retransmitting the first frame instead of the successive frame as a function of the comparison.