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Apparatus and method for characterizing libraries of different materials using X-ray scattering

  • US 6,371,640 B1
  • Filed: 10/03/2000
  • Issued: 04/16/2002
  • Est. Priority Date: 12/18/1998
  • Status: Expired due to Fees
First Claim
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1. An apparatus for characterizing a library, the library containing an array of members elements, at least a plurality of the members in the array containing a different combination of materials, the apparatus comprising:

  • an x-ray beam source which directs x-rays towards the library;

    a chamber which houses the library;

    a beamline for directing the x-ray beam onto the library in the chamber;

    the chamber further comprising a translation stage that holds the library and that is programmable to change the position of the library relative to the x-ray beam and a controller that controls the movement of the translation stage to expose an element to the x-ray beam in order to rapidly characterize the member in the library, the x-ray beam scattering off of the member; and

    a detector which detects the scattered x-ray beam in order to generate characterization data for the member.

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