Support frame for substrates

• US 6,371,712 B1
• Filed: 10/20/2000
• Issued: 04/16/2002
• Est. Priority Date: 09/21/1999
• Status: Expired due to Fees

• Current Assignee: Applied Komatsu Technology, Inc. (Applied Materials Incorporated)
• Original Assignee: Applied Komatsu Technology, Inc. (Applied Materials Incorporated)
• Inventors: Chang, Larry, White, John M., Beer, Emanuel
• Primary Examiner(s): Bratlie, Steven A.
• Application Number:
  US09/693,613
• Time in Patent Office: 543 Days
• Field of Search: 414/217, 118/729, 432/121, 248/175
• US Class Current: 414/217
• CPC Class Codes: C23C 16/4583 the substrate being supported substantially horizontally
• CPC Class Codes: C30B 25/12 Substrate holders or susceptors
• CPC Class Codes: C30B 31/14 Substrate holders or susceptors
• CPC Class Codes: F27D 5/00 Supports, screens, or the like for the charge within the furnace travelling or movable supports F27D3/12

Abstract

The present invention generally provides a system and method for supporting a substrate having a support frame that minimizes deflection encountered during thermal expansion in a processing chamber. In one embodiment, the support frame comprises one or more longitudinal members coupled to one or more transverse members. The transverse members preferably define a supporting surface on which a heated susceptor is mounted. The longitudinal member is preferably disposed below the heated susceptor, thus minimizing thermal expansion of the longitudinal member. Spacers made of thermally conductive material may be disposed at appropriate locations along the members to provide more uniform distribution of heat within the members.

Claims

1. An apparatus for supporting a susceptor, the apparatus comprising:

a support stem having a substantially hollow interior portion; and

a support frame attached to a distal end of the support stem, the support frame comprising;

at least one longitudinal support member affixed to the distal end of the support stem; and

a plurality of transverse support members coupled to the at least one longitudinal support member,

wherein the at least one longitudinal support member is thermally separated from the susceptor by the plurality of transverse support members interposed therebetween.

2. An apparatus for supporting a susceptor as recited in claim 1, wherein the at least one longitudinal support member and the plurality of transverse support members cooperatively operate to support the susceptor in a substantially planar orientation.

3. An apparatus for supporting a susceptor as recited in claim 1, the apparatus further comprising at least one spacer selectively positioned proximate a distal end of a first one of the plurality of transverse support members, wherein the at least one spacer is configured to support an edge of the susceptor.

4. An apparatus for supporting a susceptor as recited in claim 3, wherein the at least one spacer further comprises:

a spacing member;

a first securing member coupled to a first end of the spacing member; and

a second securing member coupled to a second end of the spacing member,

wherein the first and second securing members are configured to secure the spacing member to a distal end of one of the plurality of transverse support members by receiving the distal end therebetween.

5. An apparatus for supporting a susceptor as recited in claim 1, wherein the at least one longitudinal support member supports the plurality of transverse support members.

6. An apparatus for supporting a susceptor as recited in claim 1, wherein the plurality of transverse support members are of a rectangular cross section.

7. An apparatus for supporting a susceptor as recited in claim 1, wherein the at least one longitudinal support member is of a rectangular cross section.

8. An apparatus for supporting a susceptor as recited in claim 1, wherein the at least one longitudinal support member and the plurality of transverse support members are constructed of at least one of a ceramic material and a heat resistant metal alloy having a low coefficient of expansion.

9. An apparatus for supporting a susceptor as recited in claim 8, wherein the ceramic material further comprises aluminum oxide.

10. An apparatus for supporting a susceptor as recited in claim 1, wherein the plurality of transverse support members and the at least one longitudinal support member are disposed in a single plane.

11. A support frame for a susceptor, comprising:

a longitudinally extending stem member;

a first elongated frame member affixed to a distal end of the stem member at approximately a right angle thereto;

a plurality of second elongated frame members affixed to the first elongated frame member, the plurality of second frame members being configured to support the susceptor and thermally separate the first elongated frame member from the susceptor.

12. A support frame for a susceptor as recited in claim 11, wherein the plurality of second elongated frame members are transversely connected the at first frame member.

13. A support frame for a susceptor as recited in claim 12, wherein at least one of the at least two elongated secondary frame members includes a raised step positioned proximate a distal end of the at least one of the at least two elongated secondary frame members.

14. A support frame for a susceptor as recited in claim 11, the support frame further comprising a spacing member for supporting an edge of the susceptor positioned at a distal end of one of the plurality of second elongated frame members.

15. A support frame for a susceptor as recited in claim 14, wherein the spacing member further comprises:

an engaging member;

a first securing member coupled to a first end of the engaging member;

and a second securing member coupled to a second end of the engaging member; and

wherein the first and second securing members are configured to secure the engaging member to the distal end of one of the plurality of second elongated frame members.

16. A support frame for a susceptor as recited in claim 11, wherein the plurality of second elongated frame members are of a rectangular cross section.

17. A support frame for a susceptor as recited in claim 11, wherein the plurality of second elongated frame members are constructed from at least one of a ceramic material and a heat resistant metal alloy having a low coefficient of expansion.

18. A support frame for a susceptor as recited in claim 11, wherein the ceramic material further comprises aluminum oxide.

19. A support frame for a susceptor as recited in claim 11, wherein the plurality of second elongated frame members are disposed in a single plane.