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Support frame for substrates

  • US 6,371,712 B1
  • Filed: 10/20/2000
  • Issued: 04/16/2002
  • Est. Priority Date: 09/21/1999
  • Status: Expired due to Fees
First Claim
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1. An apparatus for supporting a susceptor, the apparatus comprising:

  • a support stem having a substantially hollow interior portion; and

    a support frame attached to a distal end of the support stem, the support frame comprising;

    at least one longitudinal support member affixed to the distal end of the support stem; and

    a plurality of transverse support members coupled to the at least one longitudinal support member, wherein the at least one longitudinal support member is thermally separated from the susceptor by the plurality of transverse support members interposed therebetween.

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