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Fabrication of thin-film, flexible photovoltaic module

  • US 6,372,538 B1
  • Filed: 03/16/2000
  • Issued: 04/16/2002
  • Est. Priority Date: 03/16/2000
  • Status: Expired due to Term
First Claim
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1. A method of producing a flexible, thin-film photovoltaic (PV) structure comprisingplacing a substrate in a processing chamber;

  • and applying a layer of a photovoltaic layer structure on the substrate; and

    generating internal compression in the applied layer in connection with the step of applying.

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