Electrooptic device, driving substrate for electrooptic device, and method of manufacturing the device and substrate
First Claim
1. A method of manufacturing an electrooptic device comprising a first substrate comprising a display region in which pixel electrodes are arranged, and a peripheral driving circuit region arranged in the periphery of the display region, a second substrate, and an optical material interposed between a first substrate and a second substrate, the method comprising the steps of:
- forming step portions in one side of the first substrate;
depositing a single crystal semiconductor layer on the first substrate including the step portions by graphoepitaxial growth by a catalytic CVD or high-density plasma CVD method using the step portions as seeds;
forming channel, source and drain regions in the single crystal semiconductor layer after growth of the single crystal semiconductor layer; and
forming gate portions of the channel regions to form top gate type first thin film transistors which constitute at least a portion of the peripheral driving circuit region, wherein the first thin film transistors are respectively provided in the step portions of the first substrate.
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Abstract
The present invention provides an active matrix substrate having a built-in high-performance driver, in which a single crystal silicon thin film having high electron/hole mobility is uniformly deposited at a relatively low temperature, and an electrooptic device such as a thin film semiconductor device for display including the active matrix substrate. The single crystal silicon thin film is deposited by hetero epitaxial growth by a catalytic CVD method or the like using a crystalline sapphire thin film formed on the substrate as a seed so that the single crystal silicon layer obtained is used for top gate type MOSTFTs of the electrooptic device such as a LED or the like in which a display region and a peripheral driving circuit region are integrated.
135 Citations
27 Claims
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1. A method of manufacturing an electrooptic device comprising a first substrate comprising a display region in which pixel electrodes are arranged, and a peripheral driving circuit region arranged in the periphery of the display region, a second substrate, and an optical material interposed between a first substrate and a second substrate, the method comprising the steps of:
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forming step portions in one side of the first substrate;
depositing a single crystal semiconductor layer on the first substrate including the step portions by graphoepitaxial growth by a catalytic CVD or high-density plasma CVD method using the step portions as seeds;
forming channel, source and drain regions in the single crystal semiconductor layer after growth of the single crystal semiconductor layer; and
forming gate portions of the channel regions to form top gate type first thin film transistors which constitute at least a portion of the peripheral driving circuit region, wherein the first thin film transistors are respectively provided in the step portions of the first substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method of manufacturing a driving substrate for an electrooptic device comprising a substrate on which a display region in which pixel electrodes are arranged, and a peripheral driving circuit region arranged in the periphery of the display region are provided, the method comprising the steps of:
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forming step portions in one side of the substrate;
depositing a single crystal semiconductor layer on the substrate including the step portions by graphoepitaxial growth by a catalytic CVD or high-density plasma CVD method using the step -portions as seeds; and
forming channel, source and drain regions in the single crystal semiconductor layer after growth of the single crystal semiconductor layer; and
forming gate portions of the channel regions to form top gate type first thin film transistors which constitute at least a portion of the peripheral driving circuit region, wherein the first thin film transistors are respectively provided in the step portions of the substrate.
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26. A method of manufacturing an electrooptic device comprising a first substrate comprising a display region in which pixel electrodes are arranged, and a peripheral driving circuit region arranged in the periphery of the display region, a second substrate, and an optical material interposed between the first and second substrates, the method comprising the steps of:
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forming a material layer having high lattice matching with a single crystal semiconductor on a side of the first substrate;
depositing a single crystal semiconductor layer on the first substrate including the material layer by hetero-epitaxial growth by a catalytic CVD or high-density plasma CVD using the material layer as a seed; and
forming active elements by predetermined processing of the single crystal semiconductor layer.
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27. A method of manufacturing a driving substrate for an electrooptic device comprising a substrate comprising a display region in which pixel electrodes are arranged, and a peripheral driving circuit region arranged in the periphery of the display region, the method comprising the steps of:
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forming a material layer having high lattice matching with a single crystal semiconductor on a side of the substrate;
depositing a single crystal semiconductor layer on the substrate including the material layer by hetero-epitaxial growth by a catalytic CVD or high-density plasma CVD using the material layer as a seed; and
forming at least active elements by predetermined processing of the single crystal semiconductor layer.
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Specification