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Separating method, method for transferring thin film device, thin film device, thin film integrated circuit device, and liquid crystal display device manufactured by using the transferring method

  • US 6,372,608 B1
  • Filed: 04/24/1998
  • Issued: 04/16/2002
  • Est. Priority Date: 08/27/1996
  • Status: Expired due to Term
First Claim
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1. An exfoliating method for detaching a detached member disposed on a substrate with a separation layer therebetween, comprising:

  • irradiating said separation layer with incident light from a side of said substrate causing exfoliation in said separation layer and/or at an interface of said separation layer and said substrate, and detaching said detached member from said substrate.

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