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Method apparatus for a coaxial optical microscope with focused ion beam

  • US 6,373,070 B1
  • Filed: 10/12/1999
  • Issued: 04/16/2002
  • Est. Priority Date: 10/12/1999
  • Status: Expired due to Term
First Claim
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1. An apparatus for positioning the impact point of a focused ion beam on a specimen, the apparatus comprising:

  • an ion source;

    an ion column for focusing ions from the ion source into a beam for impinging on the specimen at a target point the ion column having an ion column axis;

    and an optical microscope having an optical axis, the optical microscope and the ion column configured so that they are substantially coaxial as their axes approach the target point.

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