Edge stress reduction by noncoincident layers

• US 6,373,088 B2
• Filed: 06/10/1998
• Issued: 04/16/2002
• Est. Priority Date: 06/16/1997
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Kwok, Siang Ping, Anderson, Dirk N., Richardson, William F.
• Primary Examiner(s): Smith, Matthew
• Assistant Examiner(s): Lee, Calvin
• Application Number:
  US09/096,012
• Publication Number:
  US 20010026004A1
• Time in Patent Office: 1,406 Days
• Field of Search: 438/238, 438/239, 438/574, 438/578, 438/579, 438/582, 438/583, 438/592, 438/593, 438/652, 438/653, 438/655, 438/657, 438/658
• US Class Current: 257/303
• CPC Class Codes: H01L 21/28044 the conductor comprising at least another non-silicon conductive layer
• CPC Class Codes: H01L 21/28114 characterised by the sectional shape, e.g. T, inverted-T
• CPC Class Codes: H01L 29/42376 characterised by the length or the sectional shape
• CPC Class Codes: H01L 29/4941 with a barrier layer between the silicon and the metal or metal silicide upper layer, e.g. Silicide/TiN/Polysilicon

Abstract

The stress at the edges of a thin film conductor can be reduced by noncoincident layered structures, which takes advantage of the characteristic stress polarity changing from tensile to compressive or vice versa in the edge vicinity in order to avoid device reliability and performance problems. By using noncoincident layered structures, destructive stress interference from different layers can be achieved to reduce the stress or stress gradient at the edge. The structures and methods disclosed herein can advantageously be used in many integrated circuit and device manufacturing applications (including gates, wordlines, and bitlines).

Claims

1. An integrated circuit structure, comprising:

a. a substrate having a top surface;

b. a bottom conductor that is elongate with a substantially rectangular cross-section that presents a longitudinal center axis, two opposed sidewalls spaced apart a certain distance, a bottom wall and a top wall, the bottom wall being arranged adjacent the top surface of the substrate;

c. a top conductor that is elongate with a substantially rectangular cross-section that presents a longitudinal center axis, two opposed sidewalls, a bottom wall and a top wall, the bottom wall of the top conductor being arranged over the top wall of the bottom conductor, the longitudinal axis of the top conductor being arranged substantially aligned with the longitudinal axis of the bottom conductor, and the sidewalls of the top conductor being spaced apart a distance less than the certain distance between the sidewalls of the bottom conductor;

d. the top wall of the bottom conductor and the sidewalls of the top conductor being free of any sidewall spacers; and

e. the lead width of the top conductor being at least 0.8 times the height of the bottom conductor, and the lead width of the top conductor being within the range of 0.4 to 0.8 times the lead width of the bottom conductor.

2. The integrated circuit structure of claim 1, in which the substrate includes silicon.

3. The integrated circuit structure of claim 1, in which the bottom conductor includes material of compressive stress.

4. The integrated circuit structure of claim 1, in which the top conductor includes material of tensile stress.

5. The integrated circuit structure of claim 1, in which the bottom conductor is polysilicon.

6. The integrated circuit structure of claim 1, in which the top conductor includes refractive metal.

7. The integrated circuit structure of claim 1, in which a barrier layer is arranged in between the top and the bottom conductors.

8. The integrated circuit structure of claim 7, in which the barrier layer includes titanium nitride.

9. The integrated circuit structure of claim 7, in which the barrier layer includes titanium boride.

10. The integrated circuit structure of claim 1, in which a dielectric layer is arranged adjacent to the top wall of the top conductor.

11. The integrated circuit structure of claim 10, in which the dielectric layer includes an antireflection coating.