Combined externally pressurized gas-magnetic bearing assembly and spindle device utilizing the same
First Claim
1. A combined externally pressurized gas and magnetic bearing assembly which comprises:
- a magnetic bearing including a displacement measuring means for measuring a displacement of a rotor, said magnetic bearing being operable to support the rotor at a predetermined position by generating an electromagnetic force according to the displacement measured by the displacement measuring means;
an externally pressurized gas bearing having a fluid restrictor defined in a bearing stator of the magnetic bearing;
said displacement measuring means including a pressure sensor for measuring a pressure developed at a bearing surface of the externally pressurized gas bearing; and
a magnetic bearing control means for determining the displacement of the rotor by utilizing a value measured by the pressure sensor, to thereby control a magnetic force of the magnetic bearing.
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Accused Products
Abstract
A combined externally pressurized gas and magnetic bearing assembly (3) includes an externally pressurized gas bearing (9) and a magnetic bearing (8) that are integrated together so as to have component parts common to both of the externally pressurized gas bearing (9) and the magnetic bearing (8). The externally pressurized gas bearing (9) or the magnetic bearing (8) may be disposed within an axial extent of the magnetic bearing (8) or the externally pressurized gas bearing (9), respectively. A spindle device (1) utilizing the combined externally pressurized gas and magnetic bearing assembly (3) is also provided which includes a housing (2) for supporting a main shaft (4) rotatably through the combined externally pressurized gas and magnetic bearing assembly (3). This combined externally pressurized gas and magnetic bearing assembly (3) can be applied not only to the radial bearing, but also to the axial bearing.
56 Citations
8 Claims
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1. A combined externally pressurized gas and magnetic bearing assembly which comprises:
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a magnetic bearing including a displacement measuring means for measuring a displacement of a rotor, said magnetic bearing being operable to support the rotor at a predetermined position by generating an electromagnetic force according to the displacement measured by the displacement measuring means;
an externally pressurized gas bearing having a fluid restrictor defined in a bearing stator of the magnetic bearing;
said displacement measuring means including a pressure sensor for measuring a pressure developed at a bearing surface of the externally pressurized gas bearing; and
a magnetic bearing control means for determining the displacement of the rotor by utilizing a value measured by the pressure sensor, to thereby control a magnetic force of the magnetic bearing. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification