Method and apparatus to accurately correlate defect coordinates between photomask inspection and repair systems
First Claim
Patent Images
1. An apparatus for establishing a coordinate system, comprising:
- an optically readable media having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first processing machine for reading the media and locating the test pattern;
a coordinate initialization process operable for initializing a default coordinate system of the first processing machine by utilizing the at least one reference point and producing therefrom an initialized default coordinate system; and
a second processing machine having a second coordinate system and operable for receiving a plurality of coordinates from the first processing machine and for initializing the second coordinate system by utilizing the at least one reference point.
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Abstract
A method and apparatus for calibrating the coordinate systems of photomask processing machines improves processing efficiency and the quality of resulting photomasks. A test pattern is printed on an unproductive area of the photomask. The test pattern is used to calibrate the coordinate system of each processing machine on which the photomask is mounted. Using the test pattern as a common reference point enables points located using one processing machine to be quickly and accurately found on a second processing machine. The test pattern is also used as a reference for other metrology measurements.
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Citations
22 Claims
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1. An apparatus for establishing a coordinate system, comprising:
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an optically readable media having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first processing machine for reading the media and locating the test pattern;
a coordinate initialization process operable for initializing a default coordinate system of the first processing machine by utilizing the at least one reference point and producing therefrom an initialized default coordinate system; and
a second processing machine having a second coordinate system and operable for receiving a plurality of coordinates from the first processing machine and for initializing the second coordinate system by utilizing the at least one reference point. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An apparatus for establishing a coordinate system, comprising:
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an optically readable media having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first processing machine for reading the media and locating the test pattern;
a first coordinate initialization process for initializing a first default coordinate system of the first processing machine by utilizing at least one reference point;
a first positioning process for identifying a location of each of a plurality of points on the media in terms of the first initialized coordinate system;
a first mass storage device for storing the locations of each of the plurality of points;
a data transfer process for transferring the locations of each of the plurality of points to a second processing machine; and
the second processing machine having a second coordinate system and operable for receiving a plurality of coordinates from the first processing machine and for initializing the second coordinate system by utilizing the at least one reference point. - View Dependent Claims (12, 13)
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14. An apparatus for establishing a coordinate system, comprising:
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an optically readable media having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first processing machine for reading the media and locating the test pattern;
a first coordinate initialization process for initializing a first default coordinate system of the first processing machine by utilizing at least one reference point;
a first positioning process for identifying a location of each of a plurality of points on the media in terms of the first initialized coordinate system;
a first mass storage device for storing the locations of each of the plurality of points; and
a data transfer process for transferring the locations of each of the plurality of points to a second processing machine;
a second mass storage device for storing the locations of each of the plurality of points transferred to the second processing machine via the data transfer process; and
a second coordinate initialization process for initializing a second default coordinate system of the second processing machine by utilizing the at least one reference point.
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15. An apparatus for establishing a coordinate system, comprising:
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an optically readable media having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first processing machine for reading the media and locating the test pattern;
a first coordinate initialization process for initializing a first default coordinate system of the first processing machine by utilizing at least one reference point;
a first positioning process for identifying a location of each of a plurality of points on the media in terms of the first initialized coordinate system;
a first mass storage device for storing the locations of each of the plurality of points; and
a data transfer process for transferring the locations of each of the plurality of points to a second processing machine;
a second mass storage device for storing the locations of each of the plurality of points transferred to the second processing machine via the data transfer process;
a second coordinate initialization process for initializing a second default coordinate system of the second processing machine by utilizing at least one reference point; and
a second positioning process for identifying the locations of each of the plurality of points stored in the second mass storage device.
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16. An apparatus for establishing a coordinate system, comprising:
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an optically readable media having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first processing machine for reading the media and locating the test pattern;
a first coordinate initialization process for initializing a first default coordinate system of the first processing machine by utilizing at least one reference point;
a first positioning process for identifying a location of each of a plurality of points on the media in terms of the first initialized coordinate system;
a data transfer process for transferring the locations of each of the plurality of points to a second processing machine;
a second coordinate initialization process for initializing a second default coordinate system of the second processing machine by utilizing at least one reference point; and
a second positioning process for identifying the locations of each of the plurality of points transferred to the second processing machine via the data transfer process.
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17. An apparatus for establishing a coordinate system, comprising:
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a photomask having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first photomask processing machine for reading the photomask and locating the test pattern;
first coordinate initialization circuitry for initializing a first default coordinate system of the first photomask processing machine to the first reference point;
first positioning circuitry for identifying a location of each of a plurality of points on the photomask in terms of the first initialized coordinate system;
a communication path for transferring the locations of each of the plurality of points to a second photomask processing machine;
second coordinate initialization circuitry for converting a second default coordinate system of the second photomask processing machine to the first initialized coordinate system; and
second positioning circuitry for identifying the locations of each of the plurality of points transferred to the second photomask processing machine via the communication path.
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18. An apparatus for establishing a coordinate system, comprising:
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a photomask having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first photomask processing machine for reading the photomask and locating the test pattern;
first coordinate initialization circuitry for initializing a first default coordinate system of the first photomask processing machine to the first reference point;
first positioning circuitry for identifying a location of each of a plurality of points on the photomask in terms of the first initialized coordinate system;
a first mass storage device for storing the location of each of the plurality of points;
a data transfer device for transferring the locations of each of the plurality of points to a second photomask processing machine, the data transfer device including but not limited to portable magnetic media used in conjunction with mass storage devices;
a second mass storage device for storing the location of each of the plurality of points transferred via the data transfer device;
second coordinate initialization circuitry for converting a second default coordinate system of the second photomask processing machine to the first initialized coordinate system; and
second positioning circuitry for identifying the locations of each of the plurality of points transferred to the second photomask processing machine via the data transfer device.
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19. An apparatus for establishing a coordinate system, comprising:
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a photomask having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first photomask processing machine for reading the photomask and locating the test pattern;
first positioning circuitry for identifying a location of each of a plurality of points and the first reference point on the photomask in terms of a first default coordinate system;
a communication path for transferring the locations of each of the plurality of points to a second photomask processing machine;
coordinate initialization circuitry for initializing a second default coordinate system of the second photomask processing machine to the first default coordinate system; and
second positioning circuitry for identifying the locations of each of the plurality of points transferred to the second photomask processing machine via the communication path.
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20. An apparatus for establishing a coordinate system, comprising:
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a photomask having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point;
a first photomask processing machine for reading the photomask and locating the test pattern;
first positioning circuitry for identifying a location of each of a plurality of points and the first reference point on the photomask in terms of a first default coordinate system;
a first mass storage device for storing the location of each of the plurality of points and the first reference point;
a data transfer device for transferring the locations of each of the plurality of points to a second photomask processing machine, the data transfer device including but not limited to portable magnetic media used in conjunction with mass storage devices;
a second mass storage device for storing the location of each of the plurality of points and the first reference point transferred via the data transfer device;
coordinate initialization circuitry for initializing a second default coordinate system of the second photomask processing machine to the first default coordinate system; and
second positioning circuitry for identifying the locations of each of the plurality of points transferred to the second photomask processing machine via the data transfer device.
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21. An apparatus for establishing a coordinate system, comprising:
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a photomask having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point at a known location;
a first photomask processing machine for reading the photomask and locating the test pattern;
first coordinate initialization circuitry for initializing a first default coordinate system of the first photomask processing machine such that the known location of the first reference point is correct;
first positioning circuitry for identifying a location of each of a plurality of points on the photomask in terms of the first initialized coordinate system;
a communication path for transferring the locations of each of the plurality of points to a second photomask processing machine;
second coordinate initialization circuitry for initializing a second default coordinate system of the second photomask processing machine such that the known location of the first reference point is correct; and
second positioning circuitry for identifying the locations of each of the plurality of points transferred to the second photomask processing machine via the communication path.
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22. An apparatus for establishing a coordinate system, comprising:
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a photomask having at least one test pattern containing at least one reference point, including a first test pattern with a first reference point at a known location;
a first photomask processing machine for reading the photomask and locating the test pattern;
first coordinate initialization circuitry for initializing a first default coordinate system of the first photomask processing machine such that the known location of the first reference point is correct;
first positioning circuitry for identifying a location of each of a plurality of points on the photomask in terms of the first initialized coordinate system;
a first mass storage device for storing the location of each of the plurality of points and the first reference point;
a data transfer device for transferring the locations of each of the plurality of points to a second photomask processing machine, the data transfer device including but not limited to portable magnetic media used in conjunction with mass storage devices;
a second mass storage device for storing the location of each of the plurality of points and the first reference point transferred via the data transfer device;
second coordinate initialization circuitry for initializing a second default coordinate system of the second photomask processing machine such that the known location of the first reference point is correct; and
second positioning circuitry for identifying the locations of each of the plurality of points transferred to the second photomask processing machine via the data transfer device.
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Specification