Multi-wavelength cross-connect optical switch

• US 6,374,008 B2
• Filed: 02/08/2001
• Issued: 04/16/2002
• Est. Priority Date: 02/13/1997
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Solgaard, Olav, Bhattarai, Amal R., Heritage, Jonathan P.
• Primary Examiner(s): Lee, John D.
• Application Number:
  US09/780,122
• Publication Number:
  US 20010014196A1
• Time in Patent Office: 432 Days
• Field of Search: 385/16-18, 359/223, 359/224, 359/230, 359/291, 359/298, 359/318, 359/846, 359/847, 359/849, 359/850, 359/854, 359/855, 359/865, 359/872, 359/876
• US Class Current: 385/17
• CPC Class Codes: G01J 3/28 Investigating the spectrum using colour filters G01J3/51
• CPC Class Codes: G02B 6/32 having lens focusing means positioned between opposed fibre ends with lens being an integral part of the single fibre end G02B6/262
• CPC Class Codes: G02B 6/35 having switching means by changing the optical properties of the medium G02F1/00
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3516 the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3534 the optical element being diffractive, i.e. a grating
• CPC Class Codes: G02B 6/3542 Non-blocking switch, e.g. with multiple potential paths between multiple inputs and outputs, the establishment of one switching path not preventing the establishment of further switching paths
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/3566 involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3582 Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3592 Means for removing polarization dependence of the switching means, i.e. polarization insensitive switching light guides coupling with polarization selective and adjusting means G02B6/27
• CPC Class Codes: H04Q 11/0005 Switch and router aspects
• CPC Class Codes: H04Q 2011/0024 using space switching
• CPC Class Codes: H04Q 2011/0026 using free space propagation (e.g. lenses, mirrors)
• CPC Class Codes: H04Q 2011/0083 Testing; Monitoring

Abstract

A cross-connect switch for fiber-optic communication networks employing a wavelength dispersive element, such as a grating, and a stack of regular (non-wavelength selective) cross bar switches using two-dimensional arrays of micromachined, electrically actuated, individually-tiltable, controlled deflection micro-mirrors for providing multiport switching capability for a plurality of wavelengths. Using a one-dimensional micromirror array, a fiber-optic based MEMS switched spectrometer that does not require mechanical motion of bulk components or large diode arrays can be constructed with readout capability for WDM network diagnosis or for general purpose spectroscopic applications.

Claims

1. A micromirror optical switch, comprising:

a plurality of micromirrors;

at least one of said micromirrors suspended from a first support structure by a first pair of flexible couplings and suspended from a second support structure by a second pair of flexible couplings;

wherein said flexible couplings are configured for allowing said at least one of said micromirrors to tilt;

said optical switch configured for separating at least one wavelength component in an optical beam from at least one other wavelength component of said optical beam;

said optical switch configured for independently switching said at least one wavelength component from at least one input port to at least one output port.

2. An optical switch as recited in claim 1, wherein said flexible couplings are configured for allowing said at least one of said micromirrors to tilt in relation to at least one axis.

3. An optical switch as recited in claim 1, wherein said flexible couplings are configured for allowing said at least one of said micromirrors to tilt in relation to a first axis and in relation to a second axis.

4. An optical switch as recited in claim 3, wherein said first axis is independent of said second axis.

5. An optical switch as recited in claim 1, wherein said at least one of said micromirrors is fabricated from silicon.

6. An optical switch as recited in claim 1, wherein tilt of said at least one of said micromirrors is controlled by application of a controlled electrostatic field to said micromirror.

7. An optical switch as recited in claim 1 or 3, wherein tilt of said at least one of said micromirrors is actuated by at least one electrode.

8. An optical switch as recited in claim 1 or 3, wherein tilt of said at least one of said micromirrors is actuated by at least two electrodes.

9. An optical switch as recited in claim 1, wherein tilt of said at least one of said micromirrors is electrically actuated.

10. A micromirror optical switch, comprising:

a plurality of micromirrors;

first and second support structures;

a first pair of flexible couplings extending between said first support structure and at least one of said micromirrors; and

a second pair of flexible couplings extending between said second support structure and said at least one of said micromirrors;

wherein said flexible couplings are configured for allowing said at least one of said micromirrors to tilt;

wherein said optical switch is configured for separating at least one wavelength component in an optical beam from at least one other wavelength component of said optical beam; and

wherein said optical switch is configured for independently switching said at least one wavelength component from at least one input port to at least one output port.

11. An optical switch as recited in claim 10, wherein said flexible couplings are configured for allowing said at least one of said micromirrors to tilt in relation to at least one axis.

12. An optical switch as recited in claim 10, wherein said flexible couplings are configured for allowing said at least one of said micromirrors to tilt in relation to a first axis and in relation to a second axis.

13. An optical switch as recited in claim 12, wherein said first axis is independent of said second axis.

14. An optical switch as recited in claim 10, wherein said at least one of said micromirrors is fabricated from silicon.

15. An optical switch as recited in claim 10, wherein tilt of said at least one of said micromirrors is controlled by application of a controlled electrostatic field to said micromirror.

16. An optical switch as recited in claim 10 or 12, wherein tilt of said at least one of said micromirrors is actuated by at least one electrode.

17. An optical switch as recited in claim 10 or 12, wherein tilt of said at least one of said micromirrors is actuated by at least two electrodes.

18. An optical switch as recited in claim 10, wherein tilt of said at least one of said micromirrors is electrically actuated.

19. An optical switching array, comprising:

a plurality of micromirrors;

each said micromirror suspended from a first support structure by a first pair of flexible couplings and suspended from a second structure by a second pair of flexible couplings;

wherein said flexible couplings are configured for allowing said micromirror to tilt;

wherein said optical switching array is configured for separating at least one wavelength component in an optical beam from at least one other wavelength component of said optical beam; and

wherein said optical switching array is configured for independently switching said at least one wavelength component from at least one input port to at least one output port.

20. An optical switching array as recited in claim 19, wherein said flexible couplings are configured for allowing each said micromirror to tilt in relation to at least one axis.

21. An optical switching array as recited in claim 19, wherein said flexible couplings are configured for allowing each said micromirror to tilt in relation to a first axis and in relation to a second axis.

22. An optical switching array as recited in claim 21, wherein said first axis is independent of said second axis.

23. An optical switching array as recited in claim 19, wherein said micromirrors are fabricated from silicon.

24. An optical switching array as recited in claim 19, wherein tilt of each said micromirror is controlled by application of a controlled electrostatic field to said micromirror.

25. An optical switching array as recited in claim 19 or 21, wherein tilt of each said micromirror is actuated by at least one electrode associated with said micromirror.

26. An optical switching array as recited in claim 19 or 21, wherein tilt of each said micromirror is actuated by at least two electrodes associated with said micromirror.

27. An optical switching array as recited in claim 19, wherein tilt of each said micromirror is electrically actuated.

28. An optical switching array, comprising:

a plurality of micromirrors, each said micromirror suspended by a first pair of flexible couplings extending between said micromirror and a first support structure and suspended by a second pair of flexible couplings extending between said micromirror and a second support structure;

wherein said flexible couplings are configured for allowing each said micromirror to tilt in relation to a first axis and in relation to a second axis;

wherein said optical switching array is configured for separating at least one wavelength component in an optical beam from at least one other wavelength component of said optical beam; and

wherein said optical switching array is configured for independently switching said at least one wavelength component from at least one input port to at least one output port.

29. An optical switching array as recited in claim 28, wherein said first axis is independent of said second axis.

30. An optical switching array as recited in claim 28, wherein said micromirrors are fabricated from silicon.

31. An optical switching array as recited in claim 28, wherein tilt of each said micromirror is controlled by application of a controlled electrostatic field to said micromirror.

32. An optical switching array as recited in claim 28, wherein tilt of each said micromirror is actuated by at least one electrode associated with said micromirror.

33. An optical switching array as recited in claim 28, wherein tilt of each said micromirror is actuated by at least two electrodes associated with said micromirror.

34. An optical switching array as recited in claim 28, wherein tilt of each said micromirror is electrically actuated.