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Waferless seasoning process

  • US 6,374,832 B2
  • Filed: 03/29/1999
  • Issued: 04/23/2002
  • Est. Priority Date: 03/01/1999
  • Status: Expired due to Term
First Claim
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1. A waferless seasoning process used to season an etching chamber of an etching machine before an etching process is performed, the process comprising the step of:

  • performing a dry cleaning process in the etching chamber with a plasma formed by oxygen and hydrogen bromide to restore an etching environment in the etching chamber, wherein the etching chamber is free of wafers while performing the dry cleaning process.

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