High laser absorption copper fuse and method for making the same

• US 6,375,159 B2
• Filed: 04/30/1999
• Issued: 04/23/2002
• Est. Priority Date: 04/30/1999
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Daubenspeck, Timothy H., Motsiff, William T.
• Primary Examiner(s): Loke, Steven
• Assistant Examiner(s): Owens, Douglas W.
• Application Number:
  US09/302,915
• Time in Patent Office: 1,089 Days
• Field of Search: 257/762, 257/529, 257/764, 438/132, 438/281, 438/601
• US Class Current: 257/529
• CPC Class Codes: H01L 23/5258 the change of state resulting from the use of an external beam, e.g. laser beam or ion beam
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A high laser absorption copper fuse can minimize the laser energy needed to delete the fuse portion of the conductor. Significantly, this type of fuse structure would allow for formation of copper fuses that can be deleted with appreciably less incident energy, mainly by increasing the absorption of the fuse link at the given incident laser energies.

A metal wiring line contains a fuse link segment wherein the fuse link segment is composed of a stack of at least two metals. The underlayer material in the stack of metals is the primary electrical copper conductor, and the overlayer metal, also an electrical conductor, primarily tungsten or titanium-tungsten in composition, has predetermined thickness and optical properties chosen such that the combination of the overlayer metal with the underlayer metal provides for high absorption characteristics to incident infrared energy.

Fabrication methods for providing overlaying material to the entire fuse link line, or to selective portions of the fuse link line are presented.

Claims

1. A radiation absorbing conductor having a top surface and a given conductivity characteristic that can be substantially altered by said radiation, comprising an electrical conductor having a bottom first layer of a first material that is substantially insensitive to said radiation, and a top second layer of a second material that is sensitive to said radiation, wherein said top second layer covers said bottom first layer forming a protective coating over said bottom first layer, and is exposed to said radiation incident on said conductor top surface, such that upon exposure to said radiation, a portion of said bottom first layer and a portion of said top second layer are deleted to form a non-conducting path.

2. The conductor of claim 1 wherein the sensitivity of said second material is to radiation emitted from a laser in an infrared energy spectrum.

3. The conductor of claim 1 wherein said bottom first material is a primary electrical conductor insensitive to said radiation and said top second material is an electrical conductor of a composition sensitive to said radiation and adapted to absorb said radiation, such that when combined with said primary electrical conductor provides for a high infrared energy absorbing structure.

4. The conductor of claim 3 wherein said first material is copper.

5. The conductor of claim 3 wherein said second material is tungsten.

6. The conductor of claim 3 wherein said second material is a titanium-tungsten composition.

7. The conductor of claim 6 wherein said titanium-tungsten composition comprises ten percent titanium by weight.

8. The conductor of claim 2 wherein said infrared energy spectrum comprises energy having wavelengths in the range of 1.0 to 1.4 μ

m.

9. The conductor of claim 1 wherein said second material layer provides a protective layer for said first material and a barrier against diffusion.

10. The conductor of claim 1 wherein said first layer of said first material is greater than or equal to 500 Angstroms in thickness, and said second layer of said second material is greater than or equal to 500 Angstroms in thickness.

11. A radiation absorbing conductor having a top surface and a given conductivity characteristic that can be substantially altered by said radiation, comprising an electrical conductor having a bottom first layer of copper material that is substantially insensitive to said radiation, and a top second layer of a second material that is sensitive to said radiation, wherein said top second layer covers said bottom first layer forming a protective coating over said bottom first layer, and is exposed to said radiation incident on said conductor top surface, such that upon exposure to said radiation, a portion of said bottom first layer and a portion of said top second layer are deleted to form a non-conducting path.