Vacuum pumps

• US 6,375,413 B1
• Filed: 11/09/2000
• Issued: 04/23/2002
• Est. Priority Date: 11/19/1999
• Status: Expired due to Term

• Current Assignee: Edwards Limited (Atlas Copco AB)
• Original Assignee: BOC Group BV (Linde Plc)
• Inventors: Stones, Ian David
• Primary Examiner(s): Ryznic, John E.
• Application Number:
  US09/710,298
• Time in Patent Office: 530 Days
• Field of Search: 415/90, 415/143, 415/71, 415/73, 415/77, 415/83, 415/84, 417/423.4
• US Class Current: 415/90
• CPC Class Codes: F04D 17/168 Pumps specially adapted to produce a vacuum
• CPC Class Codes: F04D 19/044 Holweck-type pumps
• CPC Class Codes: F04D 19/046 Combinations of two or more different types of pumps
• CPC Class Codes: F04D 23/008 Regenerative pumps for liquids or for liquids and elastic fluids F04D5/002

Abstract

A vacuum pump for pumping gas from a pump inlet to a pump outlet, comprising a rotor and a stator body in which the rotor is adapted for rotation and including at least two molecular drag stages each comprising adjacent stationary and rotating Holweck cylinders attached to the stator body and the rotor respectively and with a threaded upstanding helical flange positioned therebetween which is attached either to the stationary or to the rotating cylinder wherein the molecular drag stage closest to the pump inlet has the threaded flange on its rotating cylinder and the subsequent molecular drag stage or stages has the threaded flange on the stationary cylinder.

Claims

1. A vacuum pump for pumping gas from a pump inlet to a pump outlet, comprising a rotor and a stator body in which the rotor is adapted for rotation and including at least two molecular drag stages each comprising adjacent stationary and rotating Holweck cylinders attached to the stator body and the rotor respectively and with a threaded upstanding helical flange positioned therebetween which is attached either to the stationary or to the rotating cylinder wherein the molecular drag stage closest to the pump inlet has the threaded flange on its rotating cylinder and the subsequent molecular drag stage or stages has the threaded flange on the stationary cylinder.

2. The vacuum pump according to claim 1 in which the Holweck stages are arranged in a radial configuration and adapted so that gas being pumped flows outwards from the first Holweck cylinder to a subsequent cylinder stage(s).

3. The vacuum pump according to claim 1 also including a regenerative stage towards the outlet end of the pump such that gas being pumped enters the regenerative stage following its exhaustion for the molecular drag stages.

4. The vacuum pump according to claim 3 in which the regenerative stage comprises a series of blades positioned in an annular array on one or both faces of the rotor or on an edge of the rotor.

5. The vacuum pump according to claim 4 in which the rotor has at least two series of blades positioned in concentric annular arrays on a face of the rotor and the stator has a corresponding number of channels in which the arrays of blade can rotate.

6. The vacuum pump according to claim 5 in which the blades extend in a substantially axial direction.

7. The vacuum pump according to claim 3 in which the rotor has at least five or six arrays on one or both sides thereof.

8. The vacuum pump according to claim 5 in which a flow of gas being evacuated is caused to occur from the outermost array to the innermost array to exhaust towards the centre of the pump and the cross-sectional area of the individual channels is decreased gradually from the outermost to the innermost channel.

9. The vacuum pump according claim 2 in which the rotating Holweck cylinder of the first molecular drag stage has a threaded flange of greater radial flange depth overall in comparison with that of the subsequent Holweck stage or stages.

10. The vacuum pump according to claim 2 in which the threaded flange of the first Holweck stage possesses a variable thread pitch and/or thread channel depth.

11. The vacuum pump according to claim 1 which is made available in different constructional modules.