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IC device inspection apparatus

  • US 6,377,064 B1
  • Filed: 06/29/2000
  • Issued: 04/23/2002
  • Est. Priority Date: 07/02/1999
  • Status: Expired due to Fees
First Claim
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1. An IC device inspection apparatus comprising:

  • a chamber for receiving therein an IC device to be inspected;

    an IC tester for judging performance of said IC device;

    electrical connection means arranged outside said chamber and having a conductive passage electrically connecting between said IC tester and said IC device;

    an IC socket retained on said electrical connection means, for having said IC device inserted therein;

    magnetometric detection means arranged close to said conductive passage of said electrical connection means, for detecting a magnetic field generated when electric current is supplied from said IC tester to said IC device;

    temperature control means for controlling a temperature of said IC device; and

    control means for controlling said temperature control means based on a signal delivered from said magnetometric detection means, to maintain said temperature of said IC device within a predetermined temperature range.

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