Micromechanical device with ribbed bend actuator
First Claim
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1. A method of forming a moveable micromechanical device including a bend actuator, said method comprising the steps of:
- forming a substrate comprising a series of structures formed in a plurality of deposited lower layers, said substrate having a predetermined upper surface profile;
planarizing said upper surface to achieve a substantially flat surface; and
forming said bend actuator on said upper surface of said substrate so as to bend in a direction away from and towards the substrate.
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Abstract
A method of forming a moveable micromechanical device including a bend actuator includes forming a substrate comprising a series of structures formed in a plurality of deposited lower layers, the substrate having a predetermined upper surface profile planarizing the upper surface to achieve a substantially flat surface, and forming a bend actuator on the upper surface of the substrate so as to bend in a direction away from and towards the substrate.
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Citations
9 Claims
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1. A method of forming a moveable micromechanical device including a bend actuator, said method comprising the steps of:
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forming a substrate comprising a series of structures formed in a plurality of deposited lower layers, said substrate having a predetermined upper surface profile;
planarizing said upper surface to achieve a substantially flat surface; and
forming said bend actuator on said upper surface of said substrate so as to bend in a direction away from and towards the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification