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Silicon dioxide deposition by plasma activated evaporation process

  • US 6,379,757 B1
  • Filed: 07/15/1999
  • Issued: 04/30/2002
  • Est. Priority Date: 06/26/1997
  • Status: Expired due to Term
First Claim
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1. A method for coating a plastic substrate with an abrasion resistant metal oxide layer which comprises:

  • placing the plastic substrate in a vacuum chamber, conducting electron beam evaporation of an oxide-forming metal or a metal oxide in the vacuum chamber, passing the oxide-forming metal into an argon plasma into which nitrous oxide has been passed, and exposing the plastic substrate to the plasma, whereby the abrasion resistant layer is deposited on an exposed surface of the substrate.

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