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Electrically programmable photolithography mask

  • US 6,379,847 B2
  • Filed: 10/25/1999
  • Issued: 04/30/2002
  • Est. Priority Date: 02/27/1998
  • Status: Expired due to Fees
First Claim
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1. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

  • instructions for creating a first region of the electronically programmable mask which allows transmission of light; and

    instructions for creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light is phase shifted between the first region and the second region.

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