Electrically programmable photolithography mask

• US 6,379,847 B2
• Filed: 10/25/1999
• Issued: 04/30/2002
• Est. Priority Date: 02/27/1998
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Pierrat, Christophe, Cutter, Douglas J.
• Primary Examiner(s): Rosasco, S.
• Application Number:
  US09/426,386
• Publication Number:
  US 20010049063A1
• Time in Patent Office: 918 Days
• Field of Search: 430/5, 430/322, 250/492.22, 250/492.1, 345/43, 395/500.22
• US Class Current: 430/5
• CPC Class Codes: G03F 1/26 Phase shift masks [PSM]; PSM blanks; Preparation thereof
• CPC Class Codes: G03F 1/30 Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof
• CPC Class Codes: G03F 1/32 Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion,; Preparation thereof
• CPC Class Codes: G03F 1/34 Phase-edge PSM, e.g. chromeless PSM; Preparation thereof
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

An electronically programmed mask is connected to an electronic device, such as a processor. In operation, a mask design is first entered into the processor. The processor controls a display of an image on the electronically programmed mask, wherein the display replicates conventional type masks. The electronically programmed mask is designed such that the display presented on its screen provides optical contrast and characteristics that are easily changed or reprogrammed by the processor. Electronically controlled masks provide the same patterns as mechanical type masks without requiring rigid, permanent type structures to form a desired pattern.

Claims

1. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first region of the electronically programmable mask which allows transmission of light; and

instructions for creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light is phase shifted between the first region and the second region.

2. The computer-readable medium of claim 1, wherein the instructions for creating the first and second regions include instructions for the transmission of light through the second region to be approximately 180 degrees out-of-phase with the transmission of light through the first region.

3. The computer-readable medium of claim 1, wherein the instructions for creating the first and second regions include:

instructions for the transmission of light through the second region to be a lesser percentage than the transmission of light through the first region; and

instructions for the transmission of light through the second region to be 180 degrees out-of-phase with the transmission of light through the first region.

4. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first region of the electronically programmable mask which allows transmission of light;

instructions for creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light through the second region is approximately 180 degrees out-of-phase with the transmission of light through the first region; and

instructions for creating a third region of the electronically programmable mask that blocks approximately 100% of light.

5. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first layer of the electronically programmable mask, including;

instructions for creating a first region that allows transmission of light from a light source; and

instructions for creating a second region that allows transmission of light from the light source, such that a phase of light passing through the second region is approximately 180 degrees out-of-phase with light passing through the first region; and

instructions for creating a second layer of the electronically progammable mask, including;

instructions for creating a first region that allows transmission of light from the light source; and

instructions for creating a second region that blocks approximately 100% of light from the light source.

6. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first layer of the electronically programmable mask, the first layer having a first region that allows transmission of light from a light source and a second region that blocks approximately 100% of light from the light source; and

instructions for creating a plurality of layers of the electronically programmable mask, the instructions for creating the plurality of layers including;

instructions for creating a first region in the plurality of layers that allows transmission of light from the light source; and

instructions for creating a second region in the plurality of layers that allows transmission of light from the light source, such that a phase of light passing through the second region is out-of-phase with light passing through the first region,

wherein the instruction direct that the plurality of layers are stacked such that the second regions of the plurality of layers are staggered for providing an incremental increase in phase shift of light passing through the second region of the plurality of layers so that a combined phase of light passing through the second region on a bottom layer of the plurality of layers is 180 degrees out-of-phase with light passing through the first region.

7. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first region of the electronically programmable mask which allows for approximately 100% transmission of light from a light source;

instructions for creating a second region of the electronically programmable mask such that a phase of light passing through the second region is phase shifted with light passing through the first region; and

instructions for creating a third region of the electronically programmable mask that allows a lesser percentage of light from the light source than the first region.

8. The computer-readable medium of claim 7, wherein the instructions for creating the second region include instructions for creating a second region of the electronically programmable mask such that the phase of light passing through the second region is approximately 180 degrees out-of-phase with light passing through the first region.

9. The computer-readable medium of claim 7, wherein the instructions for creating the third region include instructions for creating a third region of the electronically programmable mask that transmits approximately 10 percent of light from the light source.

10. The computer-readable medium of claim 7, wherein:

the instructions for creating the second region include instructions for creating a second region of the electronically programmable mask such that the phase of light passing through the second region is approximately 180 degrees out-of-phase with light passing through the first region; and

the instructions for creating the third region include instructions for creating a third region of the electronically programmable mask that transmits approximately 10 percent of light from the light source.

11. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first region of the electronically programmable mask which allows transmission of light;

instructions for creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light through the second region is phase shifted with the transmission of light through the first region; and

instructions for creating a third region of the electronically programmable mask that blocks approximately 100% of light.

12. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first layer of the electronically programmable mask, including;

instructions for creating a first region that allows transmission of light from a light source; and

instructions for creating a second region that allows transmission of light from the light source, such that a phase of light passing through the second region is approximately 180 degrees out-of-phase with light passing through the first region; and

instructions for creating a second layer of the electronically programmable mask, including;

instructions for creating a first region that allows transmission of light from the light source; and

instructions for creating a second region that blocks approximately 100% of light from the light source.

13. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first region of the electronically programmable mask which allows transmission of light; and

instructions for the transmission of light through the second region to be a lesser percentage than the transmission of light through the first region; and

instructions for the transmission of light through the second region to be phase-shifted with the transmission of light through the first region.

14. The computer-readable medium of claim 13, wherein the instructions for creating the second region include instructions for the transmission of light through the second region to be 10 percent of the transmission of light through the first region.

15. The computer-readable medium of claim 13, wherein the instructions for creating the second region include:

instructions for the transmission of light through the second region to be approximately 10 percent of the transmission of light through the first region; and

instructions for the transmission of light through the second region to be approximately 180 degrees out-of-phase with the transmission of light through the first region.

16. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first region of the electronically programmable mask which allows transmission of light;

instructions for creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light through the second region is approximately 180 degrees out-of-phase with the transmission of light through the first region; and

instructions for creating a third region of the electronically programmable mask that transmits approximately 10 percent of the light from the light source.

17. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first region of the electronically programmable mask which allows transmission of light; and

instructions for creating a second region of the electronically programmable mask such that transmission of light through the second region is a lesser percentage than the transmission of light through the first region.

18. The computer-readable medium of claim 17, wherein the instructions for creating the second region include instructions for the transmission of light through the second region to be 10 percent of the transmission of light through the first region.

19. A computer-readable medium having computer-executable instructions for programming an electronically programmable mask, the computer-executable instructions comprising:

instructions for creating a first region of the electronically progammable mask which allows transmission of light;

instructions for creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light through the second region is phase shifted with the transmission of light through the first region;

instructions for creating a second region of the electronically programmable mask such that transmission of light through the second region is a lesser percentage than the transmission of light through the first region; and

instructions for creating a third region of the electronically programmable mask that blocks approximately 100% of light.

20. The computer-readable medium of claim 19, wherein the instructions for creating the second region include instructions for the transmission of light through the second region to be 10 percent of the transmission of light through the first region.

21. The computer-readable medium of claim 19, wherein the instructions for creating the second region include instructions for the transmission of light through the second region to be approximately 180 degrees out-of-phase with the transmission of light through the first region.

22. The computer-readable medium of claim 21, wherein the instructions for creating the second region include instructions for the transmission of light through the second region to be 10 percent of the transmission of light through the first region.

23. A computer-readable medium having computer-executable instructions for programming an electronically progammable mask, the computer-executable instructions comprising:

instructions for creating a first layer of the electronically progammable mask, including;

instructions for creating a first region that allows transmission of light from a light source; and

instructions for creating a second region such that the transmission of light through the second region is a lesser percentage than the transmission of light through the first region;

instructions for the transmission of light through the second region to be phase-shifted with the transmission of light through the first region;

instructions for creating a second layer of the electronically programmable mask, including;

instructions for creating a first region that allows transmission of light from the light source; and

instructions for creating a second region that blocks approximately 100% of light from the light source.

24. The computer-readable medium of claim 23, wherein the instructions for creating the second region of the first layer include instructions for the transmission of light through the second to be 10 percent of the transmission of light through the first region.

25. The computer-readable medium of claim 23, wherein the instructions for creating the second region of the first layer include instructions for the transmission of light through the second region to approximately 180 degrees out-of-phase with the transmission of light through the first region of the first layer.

26. The computer-readable medium of claim 25, wherein the instructions for creating the second region of the first layer include instructions for the transmission of light through the second region to be 10 percent of the transmission of light through the first region.