Low resistance barrier layer for isolating, adhering, and passivating copper metal in semiconductor fabrication

• US 6,380,627 B1
• Filed: 06/26/1998
• Issued: 04/30/2002
• Est. Priority Date: 06/26/1998
• Status: Expired due to Fees

• Current Assignee: Lawrence Livermore National Security LLC (Government of the United States of America)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Barbee, Troy W. Jr., Weihs, Timothy P.
• Primary Examiner(s): Loke, Steven
• Assistant Examiner(s): Hu, Shouxiang
• Application Number:
  US09/105,585
• Time in Patent Office: 1,404 Days
• Field of Search: 257/750, 257/751, 257/753, 257/734, 257/761, 257/762, 257/763, 257/764, 257/766, 257/767, 257/771, 257/768
• US Class Current: 257/762
• CPC Class Codes: H01L 21/28568 the conductive layers comprising transition metals H01L21/28518 takes precedence
• CPC Class Codes: H01L 23/53238 Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Cubic or metastable cubic refractory metal carbides act as barrier layers to isolate, adhere, and passivate copper in semiconductor fabrication. One or more barrier layers of the metal carbide are deposited in conjunction with copper metallizations to form a multilayer characterized by a cubic crystal structure with a strong (100) texture. Suitable barrier layer materials include refractory transition metal carbides such as vanadium carbide (VC), niobium carbide (NbC), tantalum carbide (TaC), chromium carbide (Cr₃C₂), tungsten carbide (WC), and molybdenum carbide (MoC).

Claims

1. A semiconductor device having copper metallizations isolated from a substrate consisting essentially of:

a substrate; and

a barrier layer system, deposited on the substrate, having a cubic or metastable cubic crystal texture and comprising a plurality of alternating layers of a refractory metal carbide and copper,

the layers of refractory metal carbide having a thickness that promotes cubic crystal texture in the copper layers, and

a top copper layer deposited on the barrier layer system,

the thickness of the top copper layer being greater than an underlying copper layer.

2. The semiconductor device as recited in claim 1, wherein the refractory metal carbide is selected from vanadium carbide (VC), niobium carbide (NbC), tantalum carbide (TaC), chromium carbide (Cr₃C₂), tungsten carbide (WC), and molybdenum carbide (MoC).

3. The semiconductor device as recited in claim 1, wherein the barrier layer system has a thickness less than about one micrometer.

4. The semiconductor device as recited in claim 1, further comprising a copper layer deposited on the barrier layer system.

5. The semiconductor device as recited in claim 1, wherein each copper layer has a cubic crystal texture.

6. The semiconductor device as recited in claim 1, wherein each layer of the refractory metal carbide has a thickness less than about 500 Å

.

7. The semiconductor device as recited in claim 1, wherein each layer of the refractory metal carbide has a thickness of less than about 200 Å

.

8. The semiconductor device as recited in claim 1, wherein each layer of the copper has a thickness of less than about 1000 Å

.

9. The semiconductor device as recited in claim 1, wherein the layers of the refractory metal carbide have a thickness less than the thickness of the layers of copper.

10. The semiconductor device of claim 1, wherein the layers of refractory metal carbide are selected from the group consisting of materials having a cubic structure at equilibrium and metastable cubic structure formed under non-equilibrium conditions.

11. The semiconductor device of claim 1, wherein the layers of refractory metal carbide are selected from the group consisting of chromium carbide, vanadium carbide, niobium carbide, tantalum carbide, tungsten carbide, and molybdenum carbide.