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Testing apparatus for test piece testing method contactor and method of manufacturing the same

  • US 6,380,755 B1
  • Filed: 09/10/1999
  • Issued: 04/30/2002
  • Est. Priority Date: 09/14/1998
  • Status: Expired due to Fees
First Claim
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1. A testing apparatus for testing the electric characteristics of a plurality of circuit elements formed on a test piece, comprising:

  • a chuck for supporting a test piece having a plurality of test electrodes formed on the surface;

    a tester for generating a control signal relating to an electrical characteristic test of a plurality of circuit elements formed on said test piece and for testing the electrical characteristics of said circuit elements based on the test result information generated from the circuit elements; and

    a contactor including a plurality of probe terminals that are collectively brought into contact with at least some of said test electrodes, a test pattern signal generating circuit for generating a test pattern signal in accordance with the control signal transmitted from said tester, a first electric connection wiring arranged between said test pattern signal generating circuit and said probes for transmitting the test pattern signal generated from said test pattern signal generating circuit to said probes, and second electric connection wirings for outputting the test result information generated from the circuit elements to the tester via the probe terminals.

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