Testing apparatus for test piece testing method contactor and method of manufacturing the same

• US 6,380,755 B1
• Filed: 09/10/1999
• Issued: 04/30/2002
• Est. Priority Date: 09/14/1998
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Sato, Takashi
• Primary Examiner(s): Karlsen, Ernest
• Assistant Examiner(s): TANG, MINH NHUT
• Application Number:
  US09/393,167
• Time in Patent Office: 963 Days
• Field of Search: 324/754, 324/755, 324/765, 324/760, 324/761, 324/759, 439/482, 439/842
• US Class Current: 324/754.07
• CPC Class Codes: G01R 31/31727 Clock circuits aspects, e.g. test clock circuit details, timing aspects for signal generation, circuits for testing clocks G01R31/31725 takes precedence; concerning scan test G01R31/318552, for tester hardware G01R31/31922
• CPC Class Codes: G01R 31/318505 Test of Modular systems, e.g. Wafers, MCM's
• CPC Class Codes: G01R 31/31905 Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

Abstract

An apparatus of the present invention for testing a test piece comprises a contactor including a clock circuit capable of varying the frequency and a pattern signal generating circuit for generating a test pattern signal in conformity with the frequency of the clock circuit. It is possible for the contactor to further include a comparator circuit. These circuits are controlled by a control signal supplied from a tester. The contactor of the present invention also includes a via hole formed in a surface region of the contactor substrate for receiving the probe terminal, a conductive layer covering the inner circumferential surface of the via hole, and a wiring pattern electrically connected to the conductive layer.

Claims

1. A testing apparatus for testing the electric characteristics of a plurality of circuit elements formed on a test piece, comprising:

a chuck for supporting a test piece having a plurality of test electrodes formed on the surface;

a tester for generating a control signal relating to an electrical characteristic test of a plurality of circuit elements formed on said test piece and for testing the electrical characteristics of said circuit elements based on the test result information generated from the circuit elements; and

a contactor including a plurality of probe terminals that are collectively brought into contact with at least some of said test electrodes, a test pattern signal generating circuit for generating a test pattern signal in accordance with the control signal transmitted from said tester, a first electric connection wiring arranged between said test pattern signal generating circuit and said probes for transmitting the test pattern signal generated from said test pattern signal generating circuit to said probes, and second electric connection wirings for outputting the test result information generated from the circuit elements to the tester via the probe terminals.

2. A testing apparatus according to claim 1, wherein said test piece is a plurality of IC chips formed on a semiconductor wafer.

3. A testing apparatus according to claim 1, further comprising a pushing mechanism for pushing said contactor toward the test piece held on said chuck to bring the contactor into contact with the chuck.

4. A testing apparatus according to claim 1, wherein said contactor further includes a contactor substrate on which said probe terminals are mounted and a holder for holding said contactor substrate.

5. A testing apparatus according to claim 1, wherein said contactor further includes a clock circuit for generating a clock signal whose frequency can be varied, and said test pattern signal generating circuit generates a test pattern signal in accordance with the clock signal generated from said clock circuit.

6. A testing apparatus according to claim 1, wherein said contactor further includes a comparator circuit for comparing the test result information generated from the circuit elements with an expected value pattern signal to determine whether the electrical characteristics of the circuit element are good or not.

7. A testing apparatus according to claim 1, wherein said contactor further includes:

a register for temporarily storing the test result information generated from the circuit elements; and

a comparator circuit for comparing the test result information supplied from said register with an expected value pattern signal so as to determine whether the electrical characteristics of the circuit element are good or not.

8. A testing apparatus according to claim 1, wherein said chuck and said contactor are arranged within a test piece housing body for housing the test piece.

9. A testing apparatus for testing the electric characteristics of a plurality of circuit elements formed on a test piece, comprising:

a chuck for supporting a test piece having a plurality of test electrodes formed on the surface;

a tester for generating a control signal relating to an electrical characteristic test of a plurality of circuit elements formed on said test piece and for testing the electrical characteristics of said circuit elements based on the test result information generated from the circuit elements; and

a contactor including a plurality of probe terminals that are collectively brought into contact with at least some of said test electrodes, a test pattern signal generating circuit for generating a test pattern signal in accordance with the control signal transmitted from said tester, a first electric connection wiring arranged between said test pattern signal generating circuit and said probes for transmitting the test pattern signal generated from said test pattern signal generating circuit to said probes, and a second electric connection wiring for outputting the test result information generated from the circuit elements to the tester via the probe terminals.