Testing apparatus for test piece testing method contactor and method of manufacturing the same
First Claim
1. A testing apparatus for testing the electric characteristics of a plurality of circuit elements formed on a test piece, comprising:
- a chuck for supporting a test piece having a plurality of test electrodes formed on the surface;
a tester for generating a control signal relating to an electrical characteristic test of a plurality of circuit elements formed on said test piece and for testing the electrical characteristics of said circuit elements based on the test result information generated from the circuit elements; and
a contactor including a plurality of probe terminals that are collectively brought into contact with at least some of said test electrodes, a test pattern signal generating circuit for generating a test pattern signal in accordance with the control signal transmitted from said tester, a first electric connection wiring arranged between said test pattern signal generating circuit and said probes for transmitting the test pattern signal generated from said test pattern signal generating circuit to said probes, and second electric connection wirings for outputting the test result information generated from the circuit elements to the tester via the probe terminals.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus of the present invention for testing a test piece comprises a contactor including a clock circuit capable of varying the frequency and a pattern signal generating circuit for generating a test pattern signal in conformity with the frequency of the clock circuit. It is possible for the contactor to further include a comparator circuit. These circuits are controlled by a control signal supplied from a tester. The contactor of the present invention also includes a via hole formed in a surface region of the contactor substrate for receiving the probe terminal, a conductive layer covering the inner circumferential surface of the via hole, and a wiring pattern electrically connected to the conductive layer.
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Citations
9 Claims
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1. A testing apparatus for testing the electric characteristics of a plurality of circuit elements formed on a test piece, comprising:
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a chuck for supporting a test piece having a plurality of test electrodes formed on the surface;
a tester for generating a control signal relating to an electrical characteristic test of a plurality of circuit elements formed on said test piece and for testing the electrical characteristics of said circuit elements based on the test result information generated from the circuit elements; and
a contactor including a plurality of probe terminals that are collectively brought into contact with at least some of said test electrodes, a test pattern signal generating circuit for generating a test pattern signal in accordance with the control signal transmitted from said tester, a first electric connection wiring arranged between said test pattern signal generating circuit and said probes for transmitting the test pattern signal generated from said test pattern signal generating circuit to said probes, and second electric connection wirings for outputting the test result information generated from the circuit elements to the tester via the probe terminals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
a register for temporarily storing the test result information generated from the circuit elements; and
a comparator circuit for comparing the test result information supplied from said register with an expected value pattern signal so as to determine whether the electrical characteristics of the circuit element are good or not.
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8. A testing apparatus according to claim 1, wherein said chuck and said contactor are arranged within a test piece housing body for housing the test piece.
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9. A testing apparatus for testing the electric characteristics of a plurality of circuit elements formed on a test piece, comprising:
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a chuck for supporting a test piece having a plurality of test electrodes formed on the surface;
a tester for generating a control signal relating to an electrical characteristic test of a plurality of circuit elements formed on said test piece and for testing the electrical characteristics of said circuit elements based on the test result information generated from the circuit elements; and
a contactor including a plurality of probe terminals that are collectively brought into contact with at least some of said test electrodes, a test pattern signal generating circuit for generating a test pattern signal in accordance with the control signal transmitted from said tester, a first electric connection wiring arranged between said test pattern signal generating circuit and said probes for transmitting the test pattern signal generated from said test pattern signal generating circuit to said probes, and a second electric connection wiring for outputting the test result information generated from the circuit elements to the tester via the probe terminals.
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Specification