×

Vertical comb drive actuated deformable mirror device and method

  • US 6,384,952 B1
  • Filed: 03/27/1998
  • Issued: 05/07/2002
  • Est. Priority Date: 03/27/1997
  • Status: Expired due to Term
First Claim
Patent Images

1. A deformable mirror comprising:

  • a vertical comb drive;

    a reflective surface attached to said vertical comb drive; and

    a spring for biasing said vertical comb drive to maintain said reflective surface in an original position absent application of a voltage to said vertical comb drive.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×