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X-ray diffraction apparatus and method for measuring X-ray rocking curves

  • US 6,385,289 B1
  • Filed: 04/10/2000
  • Issued: 05/07/2002
  • Est. Priority Date: 04/12/1999
  • Status: Active Grant
First Claim
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1. An X-ray diffraction apparatus comprising:

  • (a) an X-ray source;

    (b) a sample holder for holding a sample having a surface, said sample holder being rotatable around an ω

    -axis which is parallel to the surface of said sample;

    (c) a crystal collimator system for reflecting, towards said sample, X-rays having a predetermined wavelength out of X-rays generated by said X-ray source;

    (d) a two-dimensional position-sensitive X-ray detector having a detecting surface for detecting diffracted X-rays from said sample; and

    (e) means for simultaneously recording X-ray intensities detected at respective points on said detecting surface of said X-ray detector at rotation angles with a predetermined pitch of angle during rotation of the sample around said ω

    -axis, to thereby obtain rocking curves for said respective points.

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