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Monolithic miniature accelerometer

  • US 6,386,035 B2
  • Filed: 04/10/2001
  • Issued: 05/14/2002
  • Est. Priority Date: 10/20/1998
  • Status: Expired due to Term
First Claim
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1. A monolithic miniature accelerometer machined in a plate of material, comprising:

  • (a) a fixed part, (b) two first mobile mass parts;

    (c) two hinge blades each having one end fastened to one of said two mobile mass parts, respectively;

    (d) two resonators, each having one end fastened to one of said two mobile mass parts, respectively;

    (e) a third mobile mass part fastened to the other end of each of said two resonators, respectively, and to the other end of each of said two hinge blades, respectively; and

    (f) a flexible stem situated between said first two mobile mass parts and connecting said third mobile mass part to said fixed part.

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