Optical mirror system with multi-axis rotational control

• US 6,386,716 B2
• Filed: 06/11/2001
• Issued: 05/14/2002
• Est. Priority Date: 04/14/2000
• Status: Expired due to Fees

• Current Assignee: C Speed, LLC
• Original Assignee: C Speed, LLC
• Inventors: Fling, John J., Hagelin, Paul Merritt
• Primary Examiner(s): SIKDER, MOHAMMAD YUNUS
• Application Number:
  US09/879,025
• Publication Number:
  US 20010030817A1
• Time in Patent Office: 337 Days
• Field of Search: 359/871, 359/872, 359/220, 359/221-226, 359/298, 359/291, 359/292, 359/847, 359/846, 359/849, 359/855, 359/198, 310/306, 310/309, 310/307, 318/117
• US Class Current: 359/871
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 7/1821 for rotating or oscillating mirrors

Abstract

An optical mirror system with multi-axis rotational control is disclosed. The mirror system includes an optical surface assembly, and at least one leg assembly coupled to the optical surface assembly. The at least one leg assembly supports the optical surface above a substrate. A system and method in accordance with the present invention can operate with many different actuator mechanisms, including but not limited to, electrostatic, thermal, piezoelectric, and magnetic. An optical mirror system in accordance with the present invention accommodates large mirrors and rotation angles. Scanning mirrors can be made with this technique using standard surface-micromachining processes, or a deep RIE etch process. A device in accordance with the present invention meets the requirements for a directly scalable, high port count optical switch, utilizing a two mirror per optical I/O port configuration. An optical mirror in accordance with the present invention can be utilized in, but is not limited to, the following applications: optical add-drop multiplexers, wavelength routers, free-space optical interconnects, chip-level optical I/O, optical scanning displays, optical scanner (bar-codes, micro cameras), optical storage read/write heads, laser printers, medical replacement for glasses (incorporated with adaptive optics), medical diagnostic equipment, optical scanning for security applications.

Claims

1. An optical mirror system comprising:

an optical surface assembly, the optical surface assembly including a support plate and an optical surface coupled to the support plate;

a plurality of leg assemblies coupled to the support plate for supporting the optical surface above a substrate, each of the plurality of leg assemblies includes a leg portion and a connector, the connector coupled between the leg portion and the optical surface assembly;

an anchor is coupled to the leg portion for coupling the leg portion to the substrate; and

an actuator coupled to at least one of the leg portions for moving each of the leg portions to allow for rotation and translation of the optical surface.

2. The system of claim 1 wherein the leg portion is coupled to the anchor via flexible beams.

3. The system of claim 1 wherein the actuator comprises parallel plate electrodes.

4. The system of claim 1 wherein the actuator comprises electrostatic drives.

5. The system of claim 1 wherein the leg portion is flexible.

6. The system of claim 1 wherein the connector is flexible.

7. The system of claim 1 wherein the actuator comprises vertical electrostatic drives.

8. An optical mirror system comprising:

an optical surface;

a plurality of leg assemblies coupled to the optical surface for supporting the optical surface above a substrate, each of the plurality of leg assemblies includes a rigid leg portion and a connector, the connector coupled between the rigid leg portion and the optical surface;

a flexible anchor is coupled to the rigid leg portion for coupling the leg portion to the substrate, and

an actuator coupled to at least one of the leg portions for moving each of the leg portions to allow for rotation of the optical surface.

9. The system of claim 8 wherein the actuator comprises parallel plate electrodes.

10. The system of claim 8 wherein the actuator comprises electrostatic drives.

11. The system of claim 8 wherein the actuator comprises vertical electrostatic drives.

12. An optical mirror system comprising:

an optical surface assembly, the optical surface assembly including a support plate and an optical surface coupled to the support plate;

a plurality of leg assemblies coupled to the support plate for supporting the optical surface above a substrate, and each of the plurality of leg assemblies includes a rigid leg portion and a connector, the connector coupled between the rigid leg portion and the optical surface;

a flexible anchor is coupled to the rigid leg portion for coupling the leg portion to the substrate; and

an actuator coupled to the optical surface assembly to allow for rotation and translation of the optical surface.

13. The system of claim 12 wherein the actuator comprises parallel plate electrodes.

14. The system of claim 12 wherein the actuator comprises electrostatic drives.

15. The system of claim 12 wherein the actuator comprises vertical electrostatic drives.

16. An optical mirror system comprising:

an optical surface assembly, the optical surface assembly including a support plate and an optical surface coupled to the support plate;

a plurality of leg assemblies coupled to the support plate for supporting the optical surface above a substrate, each of the plurality of leg assemblies includes a leg portion and a connector, the connector coupled between the leg portion and the optical surface;

an anchor is coupled to the leg portion for coupling the leg portion to the substrate;

a first actuator coupled to at least one of the leg portions for moving the leg portion to allow for rotation and translation of the optical surface; and

a second actuator system coupled to the optical surface assembly to allow for rotation and translation of the optical surface.

17. The system of claim 16 wherein the leg portion is coupled to the anchor via flexible beams.

18. The system of claim 16 wherein the first actuator and the second actuator system comprises parallel plate electrodes.

19. The system of claim 16 wherein the first actuator and the second actuator system comprises electrostatic drives.

20. The system of claim 16 wherein the leg portion is flexible.

21. The system of claim 16 wherein the connector is flexible.

22. The system of claim 16 wherein the first actuator and the second actuator system comprises vertical electrostatic drives.

23. An optical mirror system comprising:

an optical surface assembly, the optical surface assembly including a support plate and an optical surface coupled to the support plate;

a plurality of leg assemblies coupled to the support plate for supporting the optical surface above a substrate, and each of the plurality of leg assemblies includes a rigid leg portion and a connector, the connector coupled between the rigid leg portion and the optical surface;

a flexible anchor is coupled to the rigid leg portion for coupling the leg portion to the substrate; and

an actuator coupled to at least one of the leg portions to allow for rotation and translation of the optical surface.

24. The system of claim 23 wherein the actuator comprises parallel plate electrodes.

25. The system of claim 23 wherein the actuator comprises electrostatic drives.

26. The system of claim 23 wherein the actuator comprises vertical electrostatic drives.