Integration of remote plasma generator with semiconductor processing chamber
First Claim
1. A substrate processing system comprising:
- a housing defining a process chamber;
a substrate support for supporting a substrate during substrate processing in the process chamber;
a remote plasma generator having an inlet and an outlet; and
a gas delivery system for introducing gases into the process chamber, the gas delivery system including a three-way valve having a valve inlet, a fist valve outlet, and a second valve outlet, the three-way valve being adjustable to switch flow between a first valve path from the valve inlet to the first valve outlet and a second valve path from the valve inlet to the second valve outlet;
a first inlet flow conduit coupled between the outlet of the remote plasma generator and the process chamber;
a remote plasma conduit coupled between the first valve outlet of the three-way valve and the inlet of the remote plasma generator; and
a second inlet flow conduit coupled between the second valve outlet of the three-way valve and the process chamber.
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Accused Products
Abstract
A compact, self-contained remote plasma generator is mounted on the lid of a semiconductor processing chamber to form an integrated substrate processing system. The remote plasma generator is activated in a clean operation to generate cleaning plasma species to provide better cleaning of the chamber and lower perfluorocarbon emissions than in situ plasma clean processes. A three-way valve is adjustable to control gas flow to the chamber. During the clean operation, the three-way valve directs a cleaning plasma precursor from a first gas line to the remote plasma generator to generate cleaning plasma species which are flowed to the chamber for cleaning deposits therein. During a deposition process, the three-way valve directs a first process gas from the flat gas line to the chamber, bypassing the remote plasma generator. The first process gas is typically mixed with a second process gas supplied from a second gas line in a mixing device prior to entering the chamber for depositing a layer on a substrate disposed therein.
773 Citations
21 Claims
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1. A substrate processing system comprising:
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a housing defining a process chamber;
a substrate support for supporting a substrate during substrate processing in the process chamber;
a remote plasma generator having an inlet and an outlet; and
a gas delivery system for introducing gases into the process chamber, the gas delivery system including a three-way valve having a valve inlet, a fist valve outlet, and a second valve outlet, the three-way valve being adjustable to switch flow between a first valve path from the valve inlet to the first valve outlet and a second valve path from the valve inlet to the second valve outlet;
a first inlet flow conduit coupled between the outlet of the remote plasma generator and the process chamber;
a remote plasma conduit coupled between the first valve outlet of the three-way valve and the inlet of the remote plasma generator; and
a second inlet flow conduit coupled between the second valve outlet of the three-way valve and the process chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A substrate processing system comprising:
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a housing defining a process chamber;
a substrate support for supporting a substrate during substrate processing in the process chamber;
a remote plasma generator;
a first gas line;
a second gas line;
a first gas supply for a first gas;
a second gas supply for a second gas;
a third gas supply for a third gas; and
means for coupling the first gas supply with the first gas line to flow the first gas through the first gas line and the remote plasma generator to the process chamber during a first operation, and for coupling the second gas supply with the first gas line to flow the second gas through the first gas line to the process chamber bypassing the remote plasma generator, coupling the third gas supply with the second gas line to flow the third gas into the process chamber, and mixing the second gas and the third gas together prior to flowing the second and third gases into the process chamber, in a second operation. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
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Specification