×

Tangential flow planar microfabricated fluid filter

  • US 6,387,290 B1
  • Filed: 07/02/1999
  • Issued: 05/14/2002
  • Est. Priority Date: 06/16/1995
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for making a microfilter useful for treating a feed liquid to separate liquid from particles contained therein, said method comprising:

  • a) providing a {100} silicon wafer;

    b) etching a feed flow channel and a filtrate collection channel into the silicon wafer of step a) with an etchant capable of attacking the {100} planes of said silicon wafer to form substantially V-shaped channels; and

    c) etching a barrier channel in said wafer.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×