Tangential flow planar microfabricated fluid filter
First Claim
1. A method for making a microfilter useful for treating a feed liquid to separate liquid from particles contained therein, said method comprising:
- a) providing a {100} silicon wafer;
b) etching a feed flow channel and a filtrate collection channel into the silicon wafer of step a) with an etchant capable of attacking the {100} planes of said silicon wafer to form substantially V-shaped channels; and
c) etching a barrier channel in said wafer.
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Abstract
A microfilter utilizing the principles of tangential flow to prevent clogging, and sloped channel sides to overcome surface tension effects is provided which has feed inlet and exit connected by a feed flow channel; a barrier channel parallel to the feed flow channel, and a filtrate collection channel parallel to the barrier channel so that liquid can flow from the feed flow channel through the barrier channel which is too small to accommodate the particles, into the filtrate collection channel, and from then through a filtrate flow channel to a filtrate exit. Several picoliters of cell-free plasma are recovered from one drop of blood for analysis.
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Citations
24 Claims
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1. A method for making a microfilter useful for treating a feed liquid to separate liquid from particles contained therein, said method comprising:
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a) providing a {100} silicon wafer;
b) etching a feed flow channel and a filtrate collection channel into the silicon wafer of step a) with an etchant capable of attacking the {100} planes of said silicon wafer to form substantially V-shaped channels; and
c) etching a barrier channel in said wafer. - View Dependent Claims (2, 3, 4)
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5. A microfilter useful for treating a feed liquid to separate liquid from particles contained therein comprising the following elements formed into the surface of a horizontal substrate:
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a) a feed inlet;
b) a feed exit;
c) a microfluidic feed flow channel having a minimum dimension sufficient to permit flow of the particles and liquid therethrough, disposed between and in fluid communication with the feed inlet and the feed exit;
d) a microfluidic filtrate collection channel parallel to the feed flow channel;
e) a single barrier channel parallel to, between, and in fluid communication with the feed flow channel and the filtrate collection channel;
the barrier channel having a depth sufficiently small to permit flow of the liquid therethrough but not the particles; and
f) a filtrate exit in fluid communication with the filtrate collection channel. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification