Toroidal low-field reactive gas source

• US 6,388,226 B1
• Filed: 02/10/2000
• Issued: 05/14/2002
• Est. Priority Date: 06/26/1997
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: Applied Science and Technology, Inc. (MKS Instruments Incorporated)
• Inventors: Chen, Xing, Smith, Donald K., Holber, William M., Georgelis, Eric
• Primary Examiner(s): PASCHALL, MARK H
• Application Number:
  US09/502,087
• Time in Patent Office: 824 Days
• Field of Search: 219/121.54, 219/121.57, 219/121.43, 219/121.59, 156/345, 156/646.1, 315/111.51, 204/298.31
• US Class Current: 219/121.57
• CPC Class Codes: H01J 27/16 using high-frequency excitation, e.g. microwave excitation
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts

Abstract

An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.

Claims

1. An apparatus for dissociating gases in a plasma comprising:

a) a plasma chamber;

b) a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

c) a switching power supply in electrical communication with the primary winding;

d) a resonance capacitor in electrical communication with the primary winding and the switching power supply, the resonance capacitor and the switching power supply forming a resonant circuit at switching frequency of the switching power supply, the resonant circuit outputting a resonance voltage on the primary winding; and

e) an electronic control circuit in electrical communication with the primary winding and the switching power supply;

wherein the control circuit maintains current in the primary winding at a first value while the resonance voltage is on the primary winding, adjusts current in the primary winding to a second value upon ignition of a plasma in the chamber, and raises current in the primary winding to a third value subsequent to switching off of the resonant circuit from the primary winding, thereby controlling ignition of the plasma.

2. The apparatus of claim 1 wherein the resonance voltage is between about one to about ten times higher than voltage supplied by the switching power supply.

3. The apparatus of claim 1 wherein the first value is below a rating of the switching power supply.

4. The apparatus of claim 1 wherein the second value is below a rating of the switching power supply and below a rating of a switching device that switches the resonance capacitor off the primary winding.

5. The apparatus of claim 1 wherein the third value is a steady-state current level in the absence of a resonance voltage on the primary winding.

6. The apparatus of claim 1 wherein the switching power supply comprises a switching semiconductor device directly coupled to a voltage supply.

7. The apparatus of claim 6 wherein the switching semiconductor device comprises a switching transistor.

8. The apparatus of claim 1 further comprising an electrode positioned in the chamber that generates free charges which assist the ignition of a plasma in the chamber.

9. The apparatus of claim 1 further comprising an electrode capacitively coupled to the chamber that generates free charges which assist the ignition of a plasma in the chamber.

10. The apparatus of claim 1 further comprising an ultraviolet light source optically coupled to the chamber that generates free charges which assist the ignition of a plasma in the chamber.

11. A method for dissociating gases in a plasma and controlling plasma ignition, the method comprising:

a) providing a chamber, and providing a transformer having a primary winding and having a magnetic core surrounding a portion of the chamber;

b) coupling a resonance capacitor to the primary winding and to a switching power supply, the resonance capacitor and the primary winding of the transformer thereby forming a resonant circuit at switching frequency of the switching power supply;

c) outputting a resonance voltage on the primary winding with the resonant circuit;

d) providing an initial ionization event in the chamber to assist ignitions;

e) maintaining current in the primary winding at a first value while the resonance voltage is on the primary winding and changing current in the primary winding to a second value upon ignition of the plasma;

f) switching off the resonant circuit from the primary winding subsequent to ignition of the plasma; and

thereafter

g) raising current in the primary winding to a third value.

12. An apparatus for dissociating gases into a plasma, comprising:

a) a plasma chamber;

b) a transformer having a primary winding and having a magnetic core surrounding a portion of the chamber;

c) a switching power supply having a cycle rate, the switching power supply being in electrical communication with the primary winding;

d) a resonance capacitor in electrical communication with the primary winding and the switching power supply, the resonance capacitor and the switching power supply forming a resonant circuit at a predetermined frequency;

e) an electronic control circuit in electrical communication with the primary winding and the switching power supply; and

f) a free charge generator in electric or optical communication with the plasma chamber;

wherein the control circuit tunes the cycle rate of the switching power to the predetermined frequency so as to raise voltage on the primary winding from an initial voltage supplied by the switching power supply to a resonance voltage, and further wherein the control circuit tunes the cycle rate of the switching power supply away from the predetermined frequency subsequent to ignition of a plasma in the chamber, thereby lowering voltage on the primary winding back to the initial voltage.

13. A method for dissociating gases in a plasma and controlling plasma ignition, the method comprising:

a) providing a plasma chamber, and providing a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

b) coupling a resonance capacitor to the primary winding and to a switching power supply, the resonance capacitor and the switching power supply thereby forming a resonant circuit at a predetermined frequency;

c) tuning cycle rate of the switching power supply to the predetermined frequency so as to raise voltage on the primary winding from a first voltage to a resonance voltage, thereby igniting a plasma which completes a secondary circuit of the transformer;

d) provide an initial ionization event in the plasma chamber to assist ignition; and

e) tuning cycle rate of the switching power supply away from the predetermined frequency subsequent to ignition of the plasma, thereby lowering voltage on the primary winding to the first voltage.

14. An apparatus for dissociating gases in a plasma comprising:

a) a plasma chamber;

b) a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

c) a switching power supply in electrical communication with the primary winding, the plasma chamber and the transformer forming a load on the switching power supply,

the power supply driving current in the primary winding, the current inducing a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer; and

d) an electronic control circuit in electrical communication with the load, the control circuit comprising a current comparator, the control circuit establishing a current set-point for the current in the primary winding;

the current comparator measuring current in the primary winding and comparing measured current to the current set-point,

the current comparator electrically communicating with the switching power supply when measured current reaches the current set-point so as to send the switching power supply into an off state;

wherein output power of the switching power supply is adjusted based on size of the load.

15. A method for dissociating gases in a plasma and controlling power of plasma sources, the method comprising:

a) providing a plasma chamber, and providing a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

b) providing a switching power supply in electrical communication with the primary winding, the plasma chamber and the transformer forming a load on the switching power supply;

c) generating a current driving the primary winding and inducing a potential inside the chamber with the current in the primary winding, the potential forming a plasma which completes a secondary circuit of the transformer;

d) establishing a current set-point for the current in the primary winding;

e) measuring current in the primary winding for each duty cycle of the switching power supply, and comparing measured current to the current set-point; and

f) sending the switching power supply into off state when measured current reaches the current set-point, thereby adjusting average output power of the switching power supply based on size of the load.

16. An apparatus for dissociating gases in a plasma comprising

a) a plasma chamber;

b) a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

c) a switching power supply in electric communication with the primary winding, the plasma chamber and the transformer forming a load on the switching power supply;

the power supply driving current in the primary winding, the current inducing a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer;

d) a capacitor connected in parallel with a secondary circuit of the transformer formed by a plasma provided in the plasma chamber; and

e) an inductor in series with the primary of the transformer;

wherein the capacitor is in resonance with the effective inductor in LC circuit at the switching frequency of the switching power supply;

the effective inductance includes the inductance of the inductor as well as the transformer; and

the LC resonant circuit maintains an amplitude of electric current in the plasma that is independent of the plasma load.

17. A method for dissociating gases in a plasma and controlling a constant current in the plasma, the method comprising:

a) providing a plasma chamber;

b) providing a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

c) providing a switching power supply in electric communication with the primary winding, the plasma chamber and the transformer forming a load on the switching power supply;

d) generating a current driving the primary winding and inducing a potential inside the chamber with the current of the primary winding, the potential forming a plasma which completes a secondary circuit of the transformer;

e) providing a capacitor connected in parallel with a secondary circuit of the transformer formed by a plasma provided in the plasma chamber, and providing an inductor connected in series with the primary of the transformer to form a resonant circuit at the switching frequency of the switching power supply; and

controlling the current flowing in the plasma by selecting the voltage of the switching power supply and the values of the resonant inductor and capacitor.

18. An apparatus for dissociating gases in a plasma comprising:

a) a plasma chamber;

b) a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber; and

c) a constant-current RF switching power supply in electrical communication with the primary winding, the switching power supply comprising an inductive element connected in series with the plasma chamber and the transformer, the plasma chamber and transformer forming a load on the switching power supply,

the switching power supply driving current through the inductive element at beginning of each half cycle, without driving current through the load,

the switching power supply switching current onto the load when current through the inductive element reaches a set-point value, current in the primary winding thereby inducing a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer,

the switching power supply switching current off the load at end of each half cycle;

wherein the inductive element maintains current through the load at about value of initial current through the inductive element, power in the switching power supply thereby being adjusted based on size of the load.

19. A method for dissociating gases in a plasma and controlling power of plasma sources, the method comprising:

a) providing a plasma chamber, and providing a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

b) providing a constant-current RF switching power supply comprising an inductive element connected in series with the plasma chamber and the transformer;

c) coupling an output of the constant-current RF switching power supply to the primary winding so that the plasma chamber and the transformer form a load on the constant-current RF switching power supply;

d) driving current through the inductive element at beginning of each half cycle, without driving current through the load;

e) switching current onto the load when current through the inductive element reaches a set-point value, current in the primary winding thereby inducing a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer, and switching current off the load at end of each half cycle; and

f) maintaining current through the load at about value of initial current through the inductive element, so that power in the constant-current switching power supply is adjusted based on size of the load.

20. An apparatus for dissociating gases comprising:

a) a plasma chamber having a gas inlet, and a plasma channel;

b) a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

c) a power supply in electrical communication with the primary winding, the power supply driving current in the primary winding, the current inducing a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer; and

d) a gas mixing device installed at the gas inlet of the plasma chamber;

wherein the gas mixing device injects a feed gas into the plasma chamber, the feed gas thereby mixing and reacting with the plasma in the chamber.

21. The apparatus of claim 20 wherein the gas mixing device is a swirl gas mixer plate.

22. The apparatus of claim 21 wherein the swirl gas mixer plate contains a plurality of openings.

23. The apparatus of claim 22 wherein the plurality of openings are at about thirty to about sixty degrees relative to an axis of the plasma channel.

24. The apparatus of claim 21 wherein the swirl gas mixer plate injects the feed gas helically into the plasma chamber so as to create a spiral flow.

25. A method for reducing the electric field required to operate a toroidal plasma source, the method comprising:

a) providing a plasma chamber in which a cross-section area of the plasma channel is substantially between about 2 cm² and about 20 cm²;

b) providing a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

c) igniting a plasma in a noble gas environment; and

d) mixing at least one reactant gas into the noble gas environment thereby forming a gas mixture and feeding the gas mixture into the plasma chamber after the plasma has been ignited;

wherein a fractional concentration of the noble gas in the gas mixture is adjusted to achieve a desired plasma impedance.

26. A method for dissociating gases into a plasma comprising:

a) providing a chamber for containing a gas at a pressure;

b) reducing pressure of the chamber to from about 0.1 torr to about 200 torr;

c) providing a transformer having a primary winding and having a magnetic core surrounding a portion of the chamber;

d) generating a current driving the primary winding with a power supply;

e) inducing a potential inside the chamber with the current in the primary winding, the potential forming a plasma which completes a secondary circuit of the transformer; and

f) introducing a reactant gas into the chamber subsequent to formation of the plasma, and thereafter adjusting pressure in the chamber to a predetermined level.

27. The method of claim 26 wherein the predetermined level is from about one millitorr to about 1.5 atmosphere.

28. The method of claim 26 wherein the gas at a pressure comprises a noble gas.

29. The method of claim 26 wherein the gas at a pressure comprises a reactant gas.

30. The method of claim 26 wherein the gas at a pressure comprises a mixture of at least one noble gas and at least one reactant gas.

31. A method processing materials with a reactive gas generated by a plasma source, the method comprising:

a) providing a plasma chamber for containing a gas at a pressure;

b) adding a noble carrier gas to a reactant gas, and introducing resulting gas mixture into the plasma chamber;

c) providing a transformer having a primary winding and having a magnetic core surrounding a portion of the plasma chamber;

d) generating a current driving the primary winding with a power supply;

e) inducing a potential inside the chamber with the current driving the primary winding, the potential forming a plasma which completes a secondary circuit of the transformer;

f) generating a reactive gas in the plasma;

g) providing a process chamber containing a material to be processed; and

h) transporting the reactive gas from the plasma chamber into the process chamber, thereby processing the material.

32. The method of claim 31 wherein the carrier gas comprises a noble gas.

33. The method of claim 31 wherein the reactive gas comprises atomic fluorine, atomic chlorine, atomic bromine and atomic oxygen.

34. The method of claim 31 wherein the reactive gas comprises atomic hydrogen, atomic nitrogen, or a mixture of atomic hydrogen and atomic nitrogen.

35. The method of claim 31 wherein flow rate of the noble carrier gas is substantially between 1 and 50 standard liters per minute.

36. The method of claim 31 wherein the process chamber is located downstream of the plasma chamber.