In-plane micromachined accelerometer and bridge circuit having same

• US 6,389,899 B1
• Filed: 05/27/1999
• Issued: 05/21/2002
• Est. Priority Date: 06/09/1998
• Status: Expired due to Fees

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Inventors: Fitzgerald, Alissa M., Chui, Benjamin W., Reynolds, Jospeh Kurth, Partridge, Aaron, Kenny, Thomas W.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US09/321,061
• Time in Patent Office: 1,090 Days
• Field of Search: 735/143.3, 735/143.6, 735/142.3, 338/5, 338/46
• US Class Current: 73/514.33
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum

Abstract

A micromachined accelerometer for measuring acceleration in a direction parallel with the plane of the accelerometer substrate. The accelerometer has a strain-isolation pedestal, a flexure attached to the pedestal, and a proof mass attached to the flexure. The pedestal is wider than the flexure and does not bend when the device is under acceleration. The pedestal serves to isolate the flexure from substrate strain which may be caused by device packaging or temperature variations. Preferably, the joint between the pedestal and flexure, and the joint between the flexure and proof mass are smoothed to prevent stress concentration. The joints have a radius of curvature of at least 1 micron. A piezoresistor is located in one sidewall of the flexure. Alternatively, two piezoresistors are located on the flexure, with one on each sidewall. In this embodiment, a center-tap connection is provided to the point where the two piezoresistors are connected. The present invention includes devices having two accelerometers with Large proof masses and two reference accelerometers having very small proof masses. The four accelerometers are electrically connected in a wheatstone bridge circuit. Also, in the embodiment having two piezoresistors on one flexure, two accelerometers (with a total of four piezoresistors) are electrically connected in a Wheatstone bridge circuit to provide accurate acceleration sensing.

Claims

1. A micromachined accelerometer, comprising:

a) a base layer;

b) an unreleased portion attached to the base layer, wherein the unreleased portion has, a hole;

c) a strain-isolation pedestal attached to the unreleased portion and extending into the hole;

d) a flexure attached to the strain-isolation pedestal, wherein the flexure is oriented in a plane perpendicular to the base layer so that the flexure bends in a direction parallel with the base layer, and wherein the flexure has a width F which is narrower than a width W of the pedestal; and

e) a proof mass attached to the flexure opposite the strain-isolation pedestal;

wherein the strain-isolation pedestal, the flexure and the proof mass are released from the base layer.

2. The accelerometer of claim 1 wherein the strain-isolation pedestal has a width 1W in a range 2F<

W<

4T, where F is a thickness of the flexure, and where T is a thickness of the strain-isolation pedestal.

3. The accelerometer of claim 1 wherein the strain-isolation pedestal has a width W in a range 4F<

W<

2T, where F is a thickness of the flexure, and where T is a thickness of the strain-isolation pedestal.

4. The accelerometer of claim 1 wherein the strain-isolation pedestal has a length D in a range 0.25T<

D<

4W, where T is a thickness of the strain-isolation pedestal, and where W is a width of the strain-isolation pedestal.

5. The accelerometer of claim 1 wherein the strain-isolation pedestal has a length D in a range 0.5T<

D<

2W, where T is a thickness of the strain-isolation pedestal, and where W is a width of the strain-isolation pedestal.

6. The accelerometer of claim 1 wherein the strain-isolation pedestal has a thickness T in the range 5-50 microns.

7. The accelerometer of claim 1 wherein the flexure has a thickness F in the range of 1-10 microns.

8. The accelerometer of claim 1 wherein the flexure has an aspect ratio in the range of 3-30.

9. The accelerometer of claim 1 wherein the base layer is etched from under the pedestal, flexure and proof mass.

10. The accelerometer of claim 1 wherein the pedestal and flexure are attached at a first smooth joint, and the proof mass and flexure are attached at a second smooth joint, and the smooth joints have a radius of curvature of at least 0.25 F.

11. The accelerometer of claim 1 wherein the pedestal and flexure are attached at a first smooth joint, and the proof mass and flexure are attached at a second smooth joint, and the smooth joints have a radius of curvature of at least 0.5 micron.

12. The accelerometer of claim 1 further comprising a piezoresistor located in a sidewall of the flexure.

13. The accelerometer of claim 12 wherein the piezoresistor is confined to the upper ½

of the flexure.

14. The accelerometer of claim 12 wherein the piezoresistors are confined to the upper {fraction (1/10)} of the flexure.

15. A micromachined accelerometer, comprising:

a) a base layer;

b) an unreleased portion attached to the base layer, wherein the unreleased portion has a hole;

c) a strain-isolation pedestal attached to the unreleased portion and extending into the hole, wherein the strain-isolation pedestal is attached to the unreleased portion;

d) a flexure attached to the strain-isolation pedestal, wherein the flexure is oriented in a plane perpendicular to the base layer so that the flexure bends in a direction parallel with the base layer, wherein the flexure has a thickness F that is narrower than a width W of the pedestal, and wherein the flexure has first sidewall and a second sidewall;

e) a proof mass attached to the flexure opposite the strain-isolation pedestal;

f) a first piezoresistor located in the first sidewall;

g) a second piezoresistor located in the second sidewall, wherein the first piezoresistor and the second piezoresistor are electrically connected in series; and

h) a center-tap electrical connection to the point where the first piezoresistor and the second piezoresistor are connected;

wherein the strain-isolation pedestal, the flexure and the proof mass are released from the base layer.

16. The accelerometer of claim 15 wherein the center tap comprises a heavily doped path extending along a top of the flexure.

17. The accelerometer of claim 15 wherein the strain-isolation pedestal has a width W in a range 2F<

W<

4T, where F is a thickness of the flexure, and where T is a thickness of the strain-isolation pedestal.

18. The accelerometer of claim 15 wherein the strain-isolation pedestal has a width W in a range 4F<

W<

2T, where F is a thickness of the flexure, and where T is a thickness of the strain-isolation pedestal.

19. The accelerometer of claim 15 wherein the strain-isolation pedestal has a length D in a range 0.25T<

D<

4W, where T is a thickness of the strain-isolation pedestal, and where W is a width of the strain-isolation pedestal.

20. The accelerometer of claim 15 wherein the strain-isolation pedestal has a length D in a range 0.5T<

D<

2W, where T is a thickness of the strain-isolation pedestal, and where W is a width of the strain-isolation pedestal.

21. The accelerometer of claim 15 wherein the strain-isolation pedestal has a thickness T in the range 5-50 microns.

22. The accelerometer of claim 15 wherein the flexure has a thickness F in the range of 1-10 microns.

23. The accelerometer of claim 15 wherein the flexure has an aspect ratio in the range of 3-30.

24. The accelerometer of claim 15 wherein the base layer is etched from under the pedestal, flexure and proof mass.

25. The accelerometer of claim 15 wherein the pedestal and flexure are attached at a first smooth joint, and the proof mass and flexure are attached at a second smooth joint, and the smooth joints have a radius of curvature of at least 0.25 F.

26. The accelerometer of claim 15 wherein the pedestal and flexure are attached at a first smooth joint, and the proof mass and flexure are attached at a second smooth joint, and the smooth joints have a radius of curvature of at least 0.5 micron.

27. The accelerometer of claim 15 wherein the piezoresistors are confined to the upper ½

of the flexure.

28. The accelerometer of claim 15 wherein the piezoresistors are confined to the upper {fraction (1/10)} of the flexure.