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Vacuum processing apparatus

  • US 6,391,114 B1
  • Filed: 05/08/2000
  • Issued: 05/21/2002
  • Est. Priority Date: 09/21/1998
  • Status: Expired due to Fees
First Claim
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1. A vacuum processing apparatus comprising:

  • a plurality of processing chambers provided with processing devices for effecting predetermined processing on a target object to be processed, being capable of achieving predetermined internal pressures, and being capable of accommodating said target object for effecting predetermined processing under the predetermined pressures, wherein said plurality of processing chambers are arranged around a central chamber provided for object transfer and being capable of achieving a predetermined internal pressure, and are connected with said central chamber, and said plurality of chambers are disposed on two or more vertically different levels, and each of said processing chambers and a processing chamber neighboring thereto in the circumferential direction of said central chamber are disposed on different levels, respectively, and overlap only partially each other.

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