Chemical vapor deposition coating of fibers using microwave application

• US 6,391,396 B1
• Filed: 11/28/2000
• Issued: 05/21/2002
• Est. Priority Date: 05/26/1998
• Status: Expired due to Fees

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Jackson, Henry W., Barmatz, Martin B., Hoover, Gordon
• Primary Examiner(s): MEEKS, TIMOTHY HOWARD
• Application Number:
  US09/724,593
• Time in Patent Office: 539 Days
• Field of Search: 118/723.MW, 118/724, 118/722, 219/690, 219/691, 219/692, 219/693, 219/764, 219/695-97, 219/678, 427/575, 427/255.5, 216/69
• US Class Current: 427/575
• CPC Class Codes: C04B 2235/5248 Carbon, e.g. graphite
• CPC Class Codes: C04B 2235/667 Sintering using wave energy, e.g. microwave sintering
• CPC Class Codes: C04B 35/62863 Silicon carbide
• CPC Class Codes: C04B 35/62884 by gas phase techniques
• CPC Class Codes: C23C 16/481 by radiant heating of the substrate
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: C23C 16/545 for coating elongated substrates
• CPC Class Codes: H05B 6/701 using microwave applicators
• CPC Class Codes: H05B 6/705 using microwave tuning
• CPC Class Codes: H05B 6/806 for laboratory use

Abstract

Chemical vapor deposition coating is carried out in a cylindrical cavity. The fibers are heated by a microwave source that is uses a TM0N0 mode, where O is an integer, and produces a field that depends substantially only on radius. The fibers are observed to determine their heating, and their position can be adjusted. Once the fibers are uniformly heated, a CVD reagent is added to process the fibers.

Claims

1. A method of heating a plurality of fibers, comprising:

providing said fibers in an environment which produces microwave energy that is substantially dependent only on radius within a cylindrical cavity;

observing said fibers, to determine a color thereof caused by the heating caused by the microwave;

adjusting a position of at least one of said fibers to make the color, and hence heating effect, more uniform; and

carrying out an operation on the heated fibers.