Method and apparatus for switching high frequency signals
First Claim
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1. A method of forming a switch, the method comprising:
- providing a conductive region;
providing a membrane;
providing a dielectric material;
disposing a region of the dielectric material between the conductive region and the membrane such that a sufficient voltage applied between the conductive region and the membrane effects a capacitive coupling between the membrane and the conductive region; and
wherein providing the dielectric material comprises providing a dielectric material having a resistivity of no greater than approximately 1×
107 ohm-cm.
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Abstract
A switch includes a conductive region, a membrane, and a dielectric region. The dielectric region is formed from a dielectric material and is disposed between the membrane and the conductive region. When a sufficient voltage is applied between the conductive region and the membrane, a capacitive coupling between the membrane and the conductive region is effected. The dielectric material has a resistivity sufficiently low to inhibit charge accumulation in the dielectric region during operation of the switch.
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Citations
11 Claims
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1. A method of forming a switch, the method comprising:
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providing a conductive region;
providing a membrane;
providing a dielectric material;
disposing a region of the dielectric material between the conductive region and the membrane such that a sufficient voltage applied between the conductive region and the membrane effects a capacitive coupling between the membrane and the conductive region; and
wherein providing the dielectric material comprises providing a dielectric material having a resistivity of no greater than approximately 1×
107 ohm-cm.- View Dependent Claims (2, 3, 8, 10)
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4. A method of forming a capacitive switch, the method comprising:
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providing a substrate;
disposing a conductive region overlying the substrate;
disposing a dielectric region overlying the conductive region;
disposing a membrane over the dielectric region such that a sufficient voltage applied between the conductive region and the membrane effects a capacitive coupling between the membrane and the conductive region; and
wherein disposing a dielectric region overlying the conductive region comprises providing a dielectric material having a resistivity that is no greater than approximately 1×
107 ohm-cm.- View Dependent Claims (5, 6, 7, 9, 11)
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Specification