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Fabrication process for microstructure protection systems related to hard disk reading unit

  • US 6,391,741 B1
  • Filed: 07/14/2000
  • Issued: 05/21/2002
  • Est. Priority Date: 07/15/1999
  • Status: Expired due to Term
First Claim
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1. A process for assembling a group of elements having at least one first element and one second element, said first element including a microstructure without package, the process comprising:

  • forming a first wafer of semiconductor material comprising a plurality of microstructures including first and second operating regions separated from each other by first trenches, forming a second wafer of semiconductor material comprising blocking regions connecting a plurality of first and second intermediate regions, said first and second intermediate regions separated from each other by second trenches;

    joining said first wafer and second wafer to form a composite wafer wherein said first operating regions are fixed to said first intermediate regions, and said second operating regions are fixed to said second intermediate regions;

    cutting said composite wafer into a plurality of units, each unit including at least one first operating region and one second operating region, and one first intermediate region and one second intermediate region;

    fixing said first intermediate region of at least one unit to said second element; and

    removing said blocking regions.

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