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Corrosion resistant imager

  • US 6,392,254 B1
  • Filed: 12/22/1999
  • Issued: 05/21/2002
  • Est. Priority Date: 01/17/1997
  • Status: Expired due to Fees
First Claim
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1. A contact pad for a pixel array, said contact pad comprising respective first, second and third regions, each of said regions having a continuous gate contact layer which is overlayed by a continuous source-drain contact layer, said first and second regions further comprising a continuous upper conductor layer comprising indium tin oxide (ITO), said continuous upper conductor layer being disposed over said source-drain contact layer;

  • said contact pad third region comprising a first via providing electrical coupling between said gate contact layer and said source-drain contact layer, said contact pad third region further being disposed to provide electrical contact to said pixel array;

    said contact pad second region comprising a second via providing electrical coupling between said source-drain contact layer and said upper conductive layer;

    said contact pad first region being adapted to provide electrical coupling between said upper conductive layer and an external device to said pixel array, said upper conductive layer being separated from said gate contact layer and said source-drain contact layer by intermediate passivation layers in said first contact pad region.

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