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Inductive RF plasma source with external discharge bridge

  • US 6,392,351 B1
  • Filed: 05/03/1999
  • Issued: 05/21/2002
  • Est. Priority Date: 05/03/1999
  • Status: Expired due to Fees
First Claim
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1. A radio-frequency inductive coupled plasma source comprising:

  • a housing having a cover, the interior of said housing serving for confining plasma generated by said plasma source;

    at least two openings in said cover;

    at least one a hollow C-shaped bridge portion which connects said at least two openings and is located outside said housing;

    at least one ferrite core which embraces said hollow C-shaped bridge portion, said ferrite core having a winding connected to an electric power supply source for generating an electromotive force which excites plasma in said hollow C-shaped bridge portion and in said interior of said housing; and

    means for the supply of a gaseous working medium into said interior of said housing.

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