Inductive RF plasma source with external discharge bridge

• US 6,392,351 B1
• Filed: 05/03/1999
• Issued: 05/21/2002
• Est. Priority Date: 05/03/1999
• Status: Expired due to Fees

• Current Assignee: Advanced Energy Industries Incorporated
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Shunʼko, Evgeny V.
• Primary Examiner(s): Shingleton, Michael B
• Application Number:
  US09/303,928
• Time in Patent Office: 1,114 Days
• Field of Search: 315/111.21, 315/111.51, 315/111.81, 156/345, 118/723.AN, 118/723.MW, 118/723.I, 118/723.R
• US Class Current: 315/111.51
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma

Abstract

An RF ICP source having a housing with a flanged cover. The interior of the housing serves for confining plasma generated by the plasma source. The cover has at least two openings which are connected by a hollow C-shaped bridge portion which is located outside the housing. The hollow C-shaped bridge portion is embraced by an annular ferrite core having a winding connected to an electric power supply source for generating a discharge current which flows through the bridge portion and through the interior of the housing. The discharge current is sufficient for inducing plasma in the interior of the housing which is supplied with a gaseous working medium. The power source operates on a relatively low frequency of 60 KHz or higher and has a power from several watt to several kilowatt. In order to provide a uniform plasma distribution and uniform plasma treatment, the cover may support a plurality of bridges. Individual control of the inductors on each bridge allows for plasma redistributing. The housing of the working chamber can be divided into two section for simultaneous treatment of two objects such as semiconductor substrates. A plate that divides the working chamber into two sections may have ferrite cores built into the plate around the bridges. In another embodiment, the flow of gaseous working medium is supplied via a tube connected to the bridge portion of the source.

Claims

1. A radio-frequency inductive coupled plasma source comprising:

a housing having a cover, the interior of said housing serving for confining plasma generated by said plasma source;

at least two openings in said cover;

at least one a hollow C-shaped bridge portion which connects said at least two openings and is located outside said housing;

at least one ferrite core which embraces said hollow C-shaped bridge portion, said ferrite core having a winding connected to an electric power supply source for generating an electromotive force which excites plasma in said hollow C-shaped bridge portion and in said interior of said housing; and

means for the supply of a gaseous working medium into said interior of said housing.

2. The plasma source of claim 1, wherein said housing has a closed bottom portion so that said interior is sealed and evacuated, said bottom portion serving to support an object to be processed by said plasma.

3. The plasma source of claim 1, wherein said at least one bridge portion is made of a non-conductive material.

4. The plasma source of claim 1, wherein said cover is made of a non-conductive material, and said bridge is made of a conductive material.

5. The plasma source of claim 3, wherein said housing and cover are made of a conductive material, and said bridge is made of a conductive material and is electrically isolated from said cover.

6. The plasma source of claim 1, wherein said cover supports a plurality of said hollow bridge portions uniformly distributed over said cover.

7. The plasma source of claim 6, wherein said housing has a bottom portion so that said interior is sealed and evacuated, said bottom portion serving to support an object to be processed by said plasma.

8. The plasma source of claim 7, said housing is made of a non-conductive material.

9. The plasma source of claim 8, wherein said housing is made of a conductive material, and said cover is made of a non-conductive material.

10. The plasma source of claim 1, wherein said housing is made of a non-conductive material and said cover is made of a conductive material.

11. The plasma source of claim 6, wherein said housing has a bottom with an opening for exposing an external object to be treated to the surface of said plasma.

12. The plasma source of claim 1, wherein said housing is separated into two sections interconnected by at least two bridges, the path of said electromotive force passing through said two bridges and through both said sections so that plasma is generated in both said two sections simultaneously for treating two objects.

13. The plasma source of claim 1, wherein said housing is separated into two sections interconnected by at least two bridges, said plate having ferrite cores built into said plate around said bridges.

14. The plasma source of claim 13, wherein said housing has a bottom with an opening for exposing an external object to be treated to the surface of said plasma.

15. The plasma source of claim 13, wherein said housing has a bottom portion so that said interior is sealed and evacuated, said objects being located in said sections in positions facing said plasma.

16. The plasma source of claim 1, wherein said means for the supply of a gaseous working medium is connected with said hollow C-shaped bridge portion via a working medium supply tube.

17. The plasma source of claim 16, wherein said ferrite core consists of two parts which are symmetrically arranged on both sides of said working medium supply tube.