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Microelectromechanical dual-mass resonator structure

  • US 6,393,913 B1
  • Filed: 02/08/2000
  • Issued: 05/28/2002
  • Est. Priority Date: 02/08/2000
  • Status: Expired due to Term
First Claim
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1. A microelectromechanical (MEM) structure, comprising:

  • (a) a parallel-plate electrostatic actuator which further comprises a plurality of stationary electrodes formed on a substrate and a first mass suspended above the substrate to form a moveable electrode, with the first mass moving along a path in a plane parallel to the plane of the substrate and in a direction perpendicular to the length of the stationary electrodes in response to an actuation voltage applied between the stationary electrodes and the first mass; and

    (b) a second mass suspended above the substrate and coupled to the first mass by a plurality of springs, with the second mass being driven by motion of the first mass to move along the same path.

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