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Partially carbonized asymmetric hollow fiber separation membrane, process for its production, and gas separation method

  • US 6,395,066 B1
  • Filed: 02/23/2000
  • Issued: 05/28/2002
  • Est. Priority Date: 03/05/1999
  • Status: Expired due to Fees
First Claim
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1. A method of separating halogen compound gases that comprise supplying a mixed gas containing at least one type of halogen compound gas and at least one type of carrier gas to a partially carbonized asymmetric hollow fiber separation membrane having an asymmetric structure obtained by partial carbonization of an aromatic polyimide hollow fiber separation membrane, with an asymmetric structure, wherein(1) the thickness of the aromatic polyimide hollow fiber membrane to be partially carbonized is 8-50 μ

  • m, (2) the thickness of the hollow fiber separation membrane obtained by partial carbonization is 8-45μ

    m, (3) the carbon content of the hollow fiber separation membrane obtained by partial carbonization is at least 1.05 time,;

    the carbon content of the aromatic polyimide hollow fiber membrane to be partially carbonized, and no greater than 90 wt %, (4) the gas permeation rate ratio (separation coefficient) for nitrogen gas and SF6 gas at 50°

    C. is 500 or greater, and withdrawing gas comprising at least one type of carrier gas having a reduced halogen compound content from the permeating side of the membrane, and recovering gas with a greater concentration of at least one type of halogen compound from the non-permeating side of the membrane.

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